Sputter 5 (AJA ATC 2200-V)

From UCSB Nanofab Wiki
Revision as of 10:48, 14 June 2013 by Silva m (talk | contribs)
Jump to: navigation, search

==

Heading text

==

Heading text
====
==
Sputter 5 (AJA ATC 2200-V)
Sputter5.jpg
Tool Type Vacuum Deposition
Location Bay 3
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description ?
Manufacturer Kurt J Lesker
Vacuum Deposition Recipes