Difference between revisions of "Spin Rinse Dryer (SemiTool)"
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(Created page with "{{tool|{{PAGENAME}} |picture=SpinRinse.jpg |type = Wet Processing |super= Don Freeborn |location=Bay 7 |description = ? |manufacturer = SemiTool }}") |
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|type = Wet Processing |
|type = Wet Processing |
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+ | |super= Michael Barreraz |
| + | |super2= Don Freeborn |
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| − | |location=Bay |
+ | |location=Bay 5 |
|description = ? |
|description = ? |
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|manufacturer = SemiTool |
|manufacturer = SemiTool |
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| + | Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers. |
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| + | Each has a dedicated cassette that can hold up to 25 wafers. |
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| + | The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available. |
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Latest revision as of 11:02, 30 August 2022
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Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.
Each has a dedicated cassette that can hold up to 25 wafers.
The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.