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File:PECVD2-SiO2-Recipe-100%SiH4-LDR-250C.pdf (42 KB) - 11:21, 20 August 2012File:PECVD2-SiO2-Recipe-100%SiH4-LDR-50C.pdf (42 KB) - 11:21, 20 August 2012File:PECVD2-SiO2-Recipe-100%SiH4-LDR-100C.pdf (42 KB) - 11:21, 20 August 2012File:PECVD2-SiO2-Recipe-100%SiH4-HDR-250C.pdf (42 KB) - 11:20, 20 August 2012File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf (446 KB) - 13:46, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:00, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:06, 3 October 2012File:PECVD2-SiO2-Recipe-100%SiH4-HDR-50C.pdf (42 KB) - 11:20, 20 August 2012File:PECVD2-SiO2-Recipe-100%SiH4-HDR-100C.pdf (42 KB) - 11:20, 20 August 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (42 KB) - 11:55, 3 October 2012File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 11:59, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 12:12, 3 October 2012File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf (375 KB) - 12:17, 3 October 2012File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf (706 KB) - 16:36, 3 October 2012File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (34 KB) - 15:48, 3 October 2012File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:49, 3 October 2012File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf (34 KB) - 15:36, 3 October 2012File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:38, 3 October 2012