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File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf (658 KB) - 16:53, 3 October 2012File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf (700 KB) - 16:48, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:06, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (42 KB) - 11:55, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:00, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (41 KB) - 12:05, 3 October 2012