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File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf (375 KB) - 12:17, 3 October 2012File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 11:59, 3 October 2012File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 12:12, 3 October 2012