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  • ICP Etching Recipes
    *[//wiki.nanotech.ucsb.edu/wiki/images/3/3e/Panasonic1-SiO-Etch.pdf SiO<sub>2</sub> Vertical Etch Recipe Parameters - CHF<sub>3</sub> "SiOVert"
    28 KB (4,356 words) - 12:49, 7 May 2024
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