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- |super= Tony Bosch |email=bosch@ece.ucsb.edu3 KB (479 words) - 10:36, 30 August 2022
- ==High Rate Bosch Etch (DSEIII)== *[//wiki.nanotech.ucsb.edu/wiki/images/4/4a/10-Si_Etch_Bosch_DSEIII.pdf Bosch Process Recipe and Characterization] - Standard recipe on the tool.28 KB (4,350 words) - 17:09, 9 April 2024