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- | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 1 (GCA 6300)|Stepper 1<br>(GCA 6300)]] | width="100" bgcolor="#DAF1FF" | [[Stepper Recipes#Stepper 2 (AutoStep 200)|Stepper 2<br>(AutoStep 200)]]975 bytes (119 words) - 23:25, 13 September 2020
- ==[[Maskless Aligner (Heidelberg MLA150)]]== ...hography Recipes for the [[Maskless Aligner (Heidelberg MLA150)|Heidelberg MLA150]]. ''Description of litho params- different lasers available, greyscale et4 KB (473 words) - 12:08, 9 May 2024
- |model = MLA150 The MLA150 allows for arbitrary direct-write patterning of I-Line photoresists from an6 KB (901 words) - 10:34, 26 January 2024
- [[category: Recipes]] ==[[Maskless Aligner (Heidelberg MLA150)]]==7 KB (917 words) - 15:04, 20 March 2024
- ...Step 200.29|GCA Stepper #2]] / [[MLA Recipes#Positive Resist .28MLA 150.29|MLA150]] |Get starting params (Dose/Focus) for '''SPR955CM-0.9''' from the Recipes section of your favorite I-Line exposure tool:5 KB (854 words) - 14:58, 31 August 2022
- #**''Starting recipes (spin, bake, exposure, develop etc.) for all photolith. tools.'' #**[[Contact Alignment Recipes|<u>Contact Aligner Recipes</u>]]23 KB (3,174 words) - 12:37, 9 May 2024
- Our Heidelberg Maskless Aligner (MLA150) will be installed the week of September 21st 2020! This tool enables flex * [https://heidelberg-instruments.com/en/products/mla150.html Heidelberg MLA150]8 KB (1,145 words) - 20:40, 30 October 2023
- Our Heidelberg Maskless Aligner (MLA150) will be installed the week of September 21st 2020! This tool enables flex * [https://heidelberg-instruments.com/en/products/mla150.html Heidelberg MLA150]9 KB (1,258 words) - 14:58, 31 August 2021