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File:ALD-SiO2-100-recipe.pdf (1.08 MB) - 11:33, 6 September 2012File:ALD-Al2O3-100-Recipe.pdf (1.08 MB) - 11:26, 6 September 2012File:ALD-HfO2-100-recipe.pdf (1.09 MB) - 11:30, 6 September 2012File:ALD-SiO2-300-recipe.pdf (1.09 MB) - 11:33, 6 September 2012File:ALD-Al2O3-300-Recipe.pdf (1.09 MB) - 11:26, 6 September 2012File:ALD-AlN-300-recipe.pdf (1.09 MB) - 11:30, 6 September 2012File:ALD-HfO2-300-recipe.pdf (1.08 MB) - 11:31, 6 September 2012File:ALD-ZrO2-300-recipe.pdf (1.08 MB) - 11:33, 6 September 2012File:ALD-Al2O3-300-Saturated-Recipe.pdf (1.2 MB) - 11:25, 6 September 2012File:ALD-Al2O3-Plasma-300C-Recipe.pdf (992 KB) - 11:26, 6 September 2012File:ALD-Operating-Instrucitons.pdf (68 KB) - 10:50, 22 August 2012File:ALD operating instructions-1.pdf (66 KB) - 08:51, 21 March 2014File:Wet Etching of ALD Al2O3 Plasma 300C.xls (42 KB) - 13:49, 2 November 2013
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