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• Lithography Recipes
  ...inks to the datasheets for each. The datasheets will often have important processing info such as spin-speed vs. thickness curves, typical process parameters, b [[Category: Processing]]
  23 KB (3,169 words) - 21:43, 16 February 2023
• Wafer scanning process traveler
  *A yellow slot number indicates that the instrument is processing the substrate. ...in highest instrument sensitivity,. but produces the lowest wafer-per-hour processing speed. In general, use the highest throughput that produces acceptable resu
  33 KB (5,424 words) - 17:05, 4 January 2024
• Lab Rules
  The Nanofab is not a teaching lab or a course in processing. The users are expected to have prior cleanroom experience and understand a ...s that abrasion of fabric surfaces results in higher particle counts. When processing, try not to scrape the wipes while handling your parts.[[File:Lab Rules - 1
  78 KB (12,785 words) - 10:16, 12 April 2023
• ICP Etching Recipes
  ...b>2</sub>O₃ is extremely high, >9000. See below TSV process for processing notes on this film.
  28 KB (4,350 words) - 17:09, 9 April 2024
• Publications - 2013-2014
  ...-to- silicon hybrid integration," ''Applied Physics A: Materials Science & Processing'' '''103''', 213-218, (2010). ...of the 36th International Conference on Acoustics, Speech'' ''and Signal Processing (IEEE)'', 2011. [UC San Diego]
  100 KB (14,246 words) - 16:34, 4 March 2020
• PubList2018
  |Heterogeneous integration for optical signal processing |Roadmap on Optical Signal Processing submitted (2018).
  77 KB (11,491 words) - 16:10, 27 November 2019

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