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File:PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf (41 KB) - 09:32, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiO2-Recipe-5W-50C.pdf (41 KB) - 11:12, 20 August 2012File:PECVD2-SiO2-Recipe-5W-100C.pdf (41 KB) - 11:12, 20 August 2012File:PECVD2-SiO2-Recipe-5W-250C.pdf (41 KB) - 11:12, 20 August 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (42 KB) - 11:55, 3 October 2012File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 11:59, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:00, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:06, 3 October 2012File:PECVD2-SiO2Recipe-5W-50C.pdf (41 KB) - 15:52, 10 October 2012File:PECVD2-SiO2Recipe-5W-100C.pdf (41 KB) - 15:52, 10 October 2012File:PECVD2-SiO2Recipe-5W-250C.pdf (41 KB) - 15:52, 10 October 2012File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:49, 3 October 2012File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:38, 3 October 2012File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf (35 KB) - 15:56, 3 October 2012File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf (658 KB) - 16:53, 3 October 2012File:PECVD2-SiN-Recipe.pdf (33 KB) - 12:07, 16 August 2012