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File:PECVD2-SiN-Recipe-NoAr-120W-250C-Low-Stress.pdf (42 KB) - 09:33, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-5W-100C-High-Stress.pdf (42 KB) - 09:32, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf (41 KB) - 09:32, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-5W-250C-High-Stress.pdf (41 KB) - 09:32, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf (375 KB) - 12:17, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (42 KB) - 11:55, 3 October 2012File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 11:59, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf (42 KB) - 12:00, 3 October 2012File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf (35 KB) - 16:14, 3 October 2012File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf (700 KB) - 16:48, 3 October 2012File:PECVD2-SiN-Recipe.pdf (33 KB) - 12:07, 16 August 2012File:PECVD2-SiN-Data.pdf (36 KB) - 12:07, 16 August 2012File:PECVD2-SiO2-Recipe-5W-50C.pdf (41 KB) - 11:12, 20 August 2012File:PECVD2-SiO2-Recipe-5W-100C.pdf (41 KB) - 11:12, 20 August 2012File:PECVD2-SiO2-Recipe-5W-250C.pdf (41 KB) - 11:12, 20 August 2012File:PECVD2-SiO2-Recipe-NoAr-250C.pdf (42 KB) - 11:17, 20 August 2012File:PECVD2-SiO2-Recipe-NoAr-100C.pdf (42 KB) - 11:17, 20 August 2012File:PECVD2-SiO2-Recipe-NoAr-50C.pdf (41 KB) - 11:17, 20 August 2012