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This special page shows the last uploaded files.
- 34-High-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf Ningcao
15:59, 29 June 2015
; 10 KB
- 35-Low-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf Ningcao
15:27, 29 June 2015
; 118 KB
- New Adv PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf Biljana
11:57, 9 January 2015
; 378 KB
- New Adv PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf Biljana
11:56, 9 January 2015
; 373 KB
- New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf Biljana
11:54, 9 January 2015
; 653 KB
- New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf Biljana
15:03, 8 January 2015
; 594 KB
- SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf Thibeault
12:41, 23 December 2014
; 336 KB
- SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf Thibeault
12:00, 23 December 2014
; 518 KB
- 31-Holography Process for 1D-lines and 2D-dots-rev-3-13-2014.pdf Ningcao
14:22, 18 April 2014
; 624 KB
- 30-Redicing Nanowire Diameter by Thermal Oxidation and Vapored HF Etch.pdf Ningcao
14:11, 18 April 2014
; 1.31 MB
- Advanced PECVD LS NITRIDE2 April 2014 LS NITRIDE 2 Data 2014 .pdf Biljana
16:43, 8 April 2014
; 0 bytes
- Advanced PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf Biljana
16:26, 8 April 2014
; 42 KB
- Advanced PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf Biljana
16:25, 8 April 2014
; 41 KB
- Advanced PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf Biljana
16:24, 8 April 2014
; 41 KB
- Advanced PECVD-Nitride2 300C standard recipe Nitride2 recipe.pdf Biljana
16:52, 24 March 2014
; 41 KB
- PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf Biljana
16:53, 12 March 2014
; 106 KB
- 26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-b.pdf Ningcao
16:59, 30 January 2014
; 1.07 MB
- 25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-a.pdf Ningcao
16:57, 30 January 2014
; 1.74 MB
- Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx Thibeault
11:33, 28 January 2014
; 19 KB
- Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx Thibeault
10:59, 27 January 2014
; 1.42 MB
- Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf Thibeault
13:40, 24 October 2013
; 175 KB
- Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf Thibeault
10:14, 24 October 2013
; 189 KB