All public logs
Jump to navigation
Jump to search
Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
(newest | oldest) View (newer 20 | older 20) (20 | 50 | 100 | 250 | 500)- 23:36, 11 June 2020 John d talk contribs changed group membership for Dread from (none) to administrator and staff (new NanoFab staff)
- 12:01, 9 June 2020 John d talk contribs uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (updated TOC and heading styles)
- 11:56, 9 June 2020 John d talk contribs uploaded a new version of File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (added TOC, minor formatting)
- 11:29, 9 June 2020 John d talk contribs uploaded File:SiO2 Etch, Ru HardMask - Fluorine ICP Etch Process - Ning Cao 2019-06.pdf (Procedure for SiO2 deep etching on Plasma-Therm SLR Fluorine Etcher, using Sputtered Ruthenium hardmask)
- 12:58, 30 May 2020 John d talk contribs uploaded File:ASML IQC Focus Mean Correction screenshot.jpg
- 21:27, 4 May 2020 John d talk contribs changed group membership for Nplaviola from administrator to administrator (temporary, until 21:27, 4 May 2021)
- 21:27, 4 May 2020 John d talk contribs changed group membership for Nplaviola from (none) to administrator (to edit CSS style info)
- 12:26, 22 April 2020 John d talk contribs uploaded File:UCSB Service Agreement.pdf (UCSB Service Agreement, for Remote Fabrication Services section of Nanotech website.)
- 10:34, 10 April 2020 John d talk contribs deleted page COVID RSS (tested - not useful)
- 14:53, 26 March 2020 John d talk contribs uploaded File:ASML Reticle Programming Params - DEM-2020-03 v1.xlsx (CAD Tutorial - example programming spreadsheet for ASML Stepper)
- 14:49, 26 March 2020 John d talk contribs deleted page File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (wrong file name)
- 14:48, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DEM-2020-03.pdf (CAD Tutorial - Example Mask order form (UCSB ASML 5500) - DEM-2020-03)
- 14:47, 26 March 2020 John d talk contribs deleted page File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (wrong name)
- 14:46, 26 March 2020 John d talk contribs uploaded File:Example Mask order form (UCSB ASML 5500) - DemisDJohn Template.pdf (CAD Tutorial - example order for for photomask manufacturer)
- 14:27, 26 March 2020 John d talk contribs uploaded File:DEMISJAN2020 - Reticle Layout v1.GDS (CAD Tutorial - final GDS CAD file for submission to phootmask manufacturer)
- 12:31, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial - ASML Reticle Programming Params - DEMISJAN2020 v1.xlsx (CAD Tutorial - ASML Reticle Programming Params spreadsheet with coordinates)
- 12:25, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1 - screenshot Device Layout cell.png
- 11:50, 26 March 2020 John d talk contribs uploaded File:CAD Tutorial for ASML Reticle v1.OAS (Mask layout CAD tutorial for ASML Stepper reticle)
- 14:27, 23 March 2020 John d talk contribs uploaded File:Editing Tutorials - List of Uploaded Files - click the file title to get file page.png
- 13:13, 17 March 2020 John d talk contribs uploaded File:Facility-Use-MOU---Intercampus-UC-User.pdf (Intercampus U.C. User - Facility Use Memorandum of Understanding, for "Getting Lab Access")