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- 12:57, 28 June 2012 diff hist +43 Tool List →Packaging
- 12:57, 28 June 2012 diff hist +30 N Dicing Saw moved Dicing Saw to Dicing Saw (ADT) current
- 12:57, 28 June 2012 diff hist 0 m Dicing Saw (ADT) moved Dicing Saw to Dicing Saw (ADT)
- 12:56, 28 June 2012 diff hist +41 N Flip-Chip Bonder moved Flip-Chip Bonder to Flip-Chip Bonder (Finetech) current
- 12:56, 28 June 2012 diff hist 0 m Flip-Chip Bonder (Finetech) moved Flip-Chip Bonder to Flip-Chip Bonder (Finetech)
- 12:55, 28 June 2012 diff hist +10 Tool List →Thermal Processing
- 12:55, 28 June 2012 diff hist +48 Tool List →Wet Processing
- 12:53, 28 June 2012 diff hist +244 Tool List →Wet Processing
- 12:50, 28 June 2012 diff hist +155 Tool List →Dry Etch
- 12:48, 28 June 2012 diff hist +25 N RIE 3 moved RIE 3 to RIE 3 (MRC) current
- 12:48, 28 June 2012 diff hist 0 m RIE 3 (MRC) moved RIE 3 to RIE 3 (MRC)
- 12:48, 28 June 2012 diff hist +25 N RIE 2 moved RIE 2 to RIE 2 (MRC) current
- 12:48, 28 June 2012 diff hist 0 m RIE 2 (MRC) moved RIE 2 to RIE 2 (MRC)
- 12:48, 28 June 2012 diff hist +28 N RIE 1 moved RIE 1 to RIE 1 (Custom) current
- 12:48, 28 June 2012 diff hist 0 m RIE 1 (Custom) moved RIE 1 to RIE 1 (Custom)
- 12:47, 28 June 2012 diff hist +101 Tool List →Vacuum Deposition
- 12:45, 28 June 2012 diff hist +38 N PECVD 1 moved PECVD 1 to PECVD 1 (PlasmTherm 790) current
- 12:45, 28 June 2012 diff hist 0 m PECVD 1 (PlasmaTherm 790) moved PECVD 1 to PECVD 1 (PlasmTherm 790)
- 12:44, 28 June 2012 diff hist 0 Tool List →Lithography
- 12:43, 28 June 2012 diff hist +166 Tool List →Lithography
- 12:39, 28 June 2012 diff hist +14 Template:Links
- 12:39, 28 June 2012 diff hist -7 Chemical List - OLD 2018-09-05
- 12:36, 28 June 2012 diff hist +6 Chemical List - OLD 2018-09-05 →Bases
- 12:36, 28 June 2012 diff hist +4 Chemical List - OLD 2018-09-05 →Bases
- 12:36, 28 June 2012 diff hist +8 Chemical List - OLD 2018-09-05 →Bases
- 12:34, 28 June 2012 diff hist -57 Chemical List - OLD 2018-09-05 →Bases
- 12:34, 28 June 2012 diff hist +83 Chemical List - OLD 2018-09-05 →Solvents
- 12:29, 28 June 2012 diff hist +116 Chemical List - OLD 2018-09-05
- 12:20, 28 June 2012 diff hist +212 Chemical List - OLD 2018-09-05
- 12:19, 28 June 2012 diff hist +6 Chemical List - OLD 2018-09-05 →Acids
- 12:17, 28 June 2012 diff hist +8 MediaWiki:Sidebar
- 12:17, 28 June 2012 diff hist +11 MediaWiki:Sidebar
- 12:15, 28 June 2012 diff hist 0 Tube Furnace (Tystar 8300) →About
- 11:34, 28 June 2012 diff hist +35 Tool List →Vacuum Deposition
- 11:32, 28 June 2012 diff hist +28 N E-Beam 4 moved E-Beam 4 to E-Beam 4 (CHA) current
- 11:32, 28 June 2012 diff hist 0 m E-Beam 4 (CHA) moved E-Beam 4 to E-Beam 4 (CHA)
- 11:32, 28 June 2012 diff hist +33 N E-Beam 3 moved E-Beam 3 to E-Beam 3 (Temescal) current
- 11:32, 28 June 2012 diff hist 0 m E-Beam 3 (Temescal) moved E-Beam 3 to E-Beam 3 (Temescal)
- 11:31, 28 June 2012 diff hist +31 N E-Beam 2 moved E-Beam 2 to E-Beam 2 (Custom) current
- 11:31, 28 June 2012 diff hist 0 m E-Beam 2 (Custom) moved E-Beam 2 to E-Beam 2 (Custom)
- 11:31, 28 June 2012 diff hist +31 N E-Beam 1 moved E-Beam 1 to E-Beam 1 (Sharon) current
- 11:31, 28 June 2012 diff hist 0 m E-Beam 1 (Sharon) moved E-Beam 1 to E-Beam 1 (Sharon)
- 11:30, 28 June 2012 diff hist +74 Tool List →Vacuum Deposition
- 11:28, 28 June 2012 diff hist +95 Tool List →Lithography
- 11:27, 28 June 2012 diff hist +26 Tool List →Lithography
- 11:26, 28 June 2012 diff hist +38 N Stepper 2 moved Stepper 2 to Stepper 2 (AutoStep 200) current
- 11:26, 28 June 2012 diff hist 0 m Stepper 2 (AutoStep 200) moved Stepper 2 to Stepper 2 (AutoStep 200)
- 11:26, 28 June 2012 diff hist +34 N Stepper 1 moved Stepper 1 to Stepper 1 (GCA 6300) current
- 11:26, 28 June 2012 diff hist 0 m Stepper 1 (GCA 6300) moved Stepper 1 to Stepper 1 (GCA 6300)
- 10:50, 28 June 2012 diff hist +1,085 Editing Tutorials
- 10:13, 28 June 2012 diff hist +13 N File:ADT.jpg {{toolimage}} current
- 10:12, 28 June 2012 diff hist -1 Dicing Saw (ADT)
- 10:11, 28 June 2012 diff hist 0 N File:ADT-Troubleshooting.pdf current
- 10:11, 28 June 2012 diff hist +11 N File:ADT-QNF-Singulation.pdf {{manuals}} current
- 10:11, 28 June 2012 diff hist +11 N File:ADT-MagneticHeadDicingProcess.pdf {{manuals}} current
- 10:10, 28 June 2012 diff hist 0 N File:ADT-Dressing-Requirements.pdf current
- 10:10, 28 June 2012 diff hist +11 N File:ADT-Dressing.pdf {{manuals}} current
- 10:09, 28 June 2012 diff hist +11 N File:ADT-Blade-Part3.pdf {{manuals}} current
- 10:09, 28 June 2012 diff hist +11 N File:ADT-Blade-Part2.pdf {{manuals}} current
- 10:09, 28 June 2012 diff hist +11 N File:ADT-Blade-Part1.pdf {{manuals}} current
- 10:08, 28 June 2012 diff hist +11 N File:ADT-Applications.pdf {{manuals}} current
- 08:47, 28 June 2012 diff hist +848 N Dicing Saw (ADT) Created page with "{{tool|{{PAGENAME}} |picture=SEM1.jpg |type = Packaging |super= Aidan Hopkins |phone= 805-893-3918x208 |location=Dicing Saw Room |email=hopkins@ece.ucsb.edu |description = ADT Di…"
- 08:42, 28 June 2012 diff hist 0 N File:FEISEM-Manual.pdf current
- 08:37, 28 June 2012 diff hist +61 N Category:Inspection, Test and Characterization Redirected page to Tool List#Inspection, Test and Characterization
- 08:28, 28 June 2012 diff hist -2 PECVD 1 (PlasmaTherm 790)
- 08:27, 28 June 2012 diff hist +2,087 N PECVD 1 (PlasmaTherm 790) Created page with "{{tool|{{PAGENAME}} |picture=e-beam1.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = Four Pock…"
- 08:07, 28 June 2012 diff hist +13 N File:FinetechFlip.jpg {{toolimage}} current
- 08:07, 28 June 2012 diff hist +949 N Flip-Chip Bonder (Finetech) Created page with "{{tool|{{PAGENAME}} |picture=FinetechFlip.jpg |type = Packaging |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Finetech Flip…"
- 08:06, 28 June 2012 diff hist +33 N Category:Packaging Redirected page to Tool List#Packaging current
- 08:03, 28 June 2012 diff hist +596 N Gold Plating Bench Created page with "{{tool|{{PAGENAME}} |picture=GoldPlating.jpg |type = Wet Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 5 |email=bosch@ece.ucsb.edu |description = Technic A…"
- 08:02, 28 June 2012 diff hist +38 N Category:Wet Processing Redirected page to Tool List#Wet Processing current
- 07:57, 28 June 2012 diff hist 0 N File:UnaxisVLREtchInstructions.pdf current
- 07:52, 28 June 2012 diff hist +102 Editing Tutorials
- 07:52, 28 June 2012 diff hist 0 N File:UnaxisVLRInstructions.pdf current
- 07:52, 28 June 2012 diff hist +77 ICP-PECVD (Unaxis VLR)
- 07:49, 28 June 2012 diff hist +1,097 N ICP-PECVD (Unaxis VLR) Created page with "{{tool|{{PAGENAME}} |picture=UnaxisVLR.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 1 |email=bosch@ece.ucsb.edu |description = High Den…"
- 07:42, 28 June 2012 diff hist +75 Nano-Imprint (Nanonex NX2000) →About
- 07:42, 28 June 2012 diff hist +14 N Category:Datasheets Created page with "All Datasheets" current
- 07:42, 28 June 2012 diff hist +13 N File:Mr-l-7000-Imprint-Polymer.pdf {{datasheet}} current
- 07:41, 28 June 2012 diff hist +94 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 07:37, 28 June 2012 diff hist +44 N Template:MSDS Created page with "<includeonly>category:MSDS</includeonly>" current
- 07:37, 28 June 2012 diff hist +50 N Template:Datasheet Created page with "<includeonly>category:Datasheets</includeonly>" current
- 07:36, 28 June 2012 diff hist +13 N File:NXR-1020-Datasheet.pdf {{datasheet}} current
- 07:36, 28 June 2012 diff hist +51 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 07:34, 28 June 2012 diff hist +1,806 N Nano-Imprint (Nanonex NX2000) Created page with "{{tool|{{PAGENAME}} |picture=Nanonex.jpg |type = Lithography |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu |description = Nanonex NX2000 N…"
- 07:31, 28 June 2012 diff hist +60 Tool List →Lithography
- 07:29, 28 June 2012 diff hist +13 N File:Tystar.jpg {{toolimage}} current
- 07:29, 28 June 2012 diff hist +1,139 N Tube Furnace (Tystar 8300) Created page with "{{tool|{{PAGENAME}} |picture=Tystar.jpg |type = Thermal Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Tystar 8" …"
- 07:27, 28 June 2012 diff hist +42 N Category:Thermal Processing Redirected page to Tool List#Thermal Processing current
- 07:24, 28 June 2012 diff hist -1 RIE 1 (Custom)
- 07:23, 28 June 2012 diff hist +80 Tool List →Thermal Processing
- 07:23, 28 June 2012 diff hist +21 MediaWiki:Sidebar
- 07:22, 28 June 2012 diff hist +176 N Editing Tutorials Created page with "=Tool Page Names= I am going off of the "Nanofab Equipment & Supervisor List" that is on dropbox. If the name of a page is incorrect, or you would like it changed, let me know."
- 07:18, 28 June 2012 diff hist +13 N File:RIE3.jpg {{toolimage}} current
- 07:17, 28 June 2012 diff hist +9 RIE 2 (MRC)
- 07:16, 28 June 2012 diff hist -3 RIE 3 (MRC)
- 07:16, 28 June 2012 diff hist -55 RIE 3 (MRC) →Detailed Specifications
- 07:14, 28 June 2012 diff hist +106 RIE 3 (MRC)
- 07:13, 28 June 2012 diff hist +371 RIE 3 (MRC)
- 07:11, 28 June 2012 diff hist +2,604 N RIE 3 (MRC) Created page with "{{tool|{{PAGENAME}} |picture=RIE2.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #2 Methane / Hydr…"