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- 10:13, 28 June 2012 diff hist +13 N File:ADT.jpg {{toolimage}} current
- 10:12, 28 June 2012 diff hist -1 Dicing Saw (ADT)
- 10:11, 28 June 2012 diff hist 0 N File:ADT-Troubleshooting.pdf current
- 10:11, 28 June 2012 diff hist +11 N File:ADT-QNF-Singulation.pdf {{manuals}} current
- 10:11, 28 June 2012 diff hist +11 N File:ADT-MagneticHeadDicingProcess.pdf {{manuals}} current
- 10:10, 28 June 2012 diff hist 0 N File:ADT-Dressing-Requirements.pdf current
- 10:10, 28 June 2012 diff hist +11 N File:ADT-Dressing.pdf {{manuals}} current
- 10:09, 28 June 2012 diff hist +11 N File:ADT-Blade-Part3.pdf {{manuals}} current
- 10:09, 28 June 2012 diff hist +11 N File:ADT-Blade-Part2.pdf {{manuals}} current
- 10:09, 28 June 2012 diff hist +11 N File:ADT-Blade-Part1.pdf {{manuals}} current
- 10:08, 28 June 2012 diff hist +11 N File:ADT-Applications.pdf {{manuals}} current
- 08:47, 28 June 2012 diff hist +848 N Dicing Saw (ADT) Created page with "{{tool|{{PAGENAME}} |picture=SEM1.jpg |type = Packaging |super= Aidan Hopkins |phone= 805-893-3918x208 |location=Dicing Saw Room |email=hopkins@ece.ucsb.edu |description = ADT Di…"
- 08:42, 28 June 2012 diff hist 0 N File:FEISEM-Manual.pdf current
- 08:37, 28 June 2012 diff hist +61 N Category:Inspection, Test and Characterization Redirected page to Tool List#Inspection, Test and Characterization
- 08:28, 28 June 2012 diff hist -2 PECVD 1 (PlasmaTherm 790)
- 08:27, 28 June 2012 diff hist +2,087 N PECVD 1 (PlasmaTherm 790) Created page with "{{tool|{{PAGENAME}} |picture=e-beam1.jpg |type = Vacuum Deposition |super= Brian Lingg |phone=(805)839-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = Four Pock…"
- 08:07, 28 June 2012 diff hist +13 N File:FinetechFlip.jpg {{toolimage}} current
- 08:07, 28 June 2012 diff hist +949 N Flip-Chip Bonder (Finetech) Created page with "{{tool|{{PAGENAME}} |picture=FinetechFlip.jpg |type = Packaging |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Finetech Flip…"
- 08:06, 28 June 2012 diff hist +33 N Category:Packaging Redirected page to Tool List#Packaging current
- 08:03, 28 June 2012 diff hist +596 N Gold Plating Bench Created page with "{{tool|{{PAGENAME}} |picture=GoldPlating.jpg |type = Wet Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 5 |email=bosch@ece.ucsb.edu |description = Technic A…"
- 08:02, 28 June 2012 diff hist +38 N Category:Wet Processing Redirected page to Tool List#Wet Processing current
- 07:57, 28 June 2012 diff hist 0 N File:UnaxisVLREtchInstructions.pdf current
- 07:52, 28 June 2012 diff hist +102 Editing Tutorials
- 07:52, 28 June 2012 diff hist 0 N File:UnaxisVLRInstructions.pdf current
- 07:52, 28 June 2012 diff hist +77 ICP-PECVD (Unaxis VLR)
- 07:49, 28 June 2012 diff hist +1,097 N ICP-PECVD (Unaxis VLR) Created page with "{{tool|{{PAGENAME}} |picture=UnaxisVLR.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 1 |email=bosch@ece.ucsb.edu |description = High Den…"
- 07:42, 28 June 2012 diff hist +75 Nano-Imprint (Nanonex NX2000) →About
- 07:42, 28 June 2012 diff hist +14 N Category:Datasheets Created page with "All Datasheets" current
- 07:42, 28 June 2012 diff hist +13 N File:Mr-l-7000-Imprint-Polymer.pdf {{datasheet}} current
- 07:41, 28 June 2012 diff hist +94 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 07:37, 28 June 2012 diff hist +44 N Template:MSDS Created page with "<includeonly>category:MSDS</includeonly>" current
- 07:37, 28 June 2012 diff hist +50 N Template:Datasheet Created page with "<includeonly>category:Datasheets</includeonly>" current
- 07:36, 28 June 2012 diff hist +13 N File:NXR-1020-Datasheet.pdf {{datasheet}} current
- 07:36, 28 June 2012 diff hist +51 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 07:34, 28 June 2012 diff hist +1,806 N Nano-Imprint (Nanonex NX2000) Created page with "{{tool|{{PAGENAME}} |picture=Nanonex.jpg |type = Lithography |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu |description = Nanonex NX2000 N…"
- 07:31, 28 June 2012 diff hist +60 Tool List →Lithography
- 07:29, 28 June 2012 diff hist +13 N File:Tystar.jpg {{toolimage}} current
- 07:29, 28 June 2012 diff hist +1,139 N Tube Furnace (Tystar 8300) Created page with "{{tool|{{PAGENAME}} |picture=Tystar.jpg |type = Thermal Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Tystar 8" …"
- 07:27, 28 June 2012 diff hist +42 N Category:Thermal Processing Redirected page to Tool List#Thermal Processing current
- 07:24, 28 June 2012 diff hist -1 RIE 1 (Custom)
- 07:23, 28 June 2012 diff hist +80 Tool List →Thermal Processing
- 07:23, 28 June 2012 diff hist +21 MediaWiki:Sidebar
- 07:22, 28 June 2012 diff hist +176 N Editing Tutorials Created page with "=Tool Page Names= I am going off of the "Nanofab Equipment & Supervisor List" that is on dropbox. If the name of a page is incorrect, or you would like it changed, let me know."
- 07:18, 28 June 2012 diff hist +13 N File:RIE3.jpg {{toolimage}} current
- 07:17, 28 June 2012 diff hist +9 RIE 2 (MRC)
- 07:16, 28 June 2012 diff hist -3 RIE 3 (MRC)
- 07:16, 28 June 2012 diff hist -55 RIE 3 (MRC) →Detailed Specifications
- 07:14, 28 June 2012 diff hist +106 RIE 3 (MRC)
- 07:13, 28 June 2012 diff hist +371 RIE 3 (MRC)
- 07:11, 28 June 2012 diff hist +2,604 N RIE 3 (MRC) Created page with "{{tool|{{PAGENAME}} |picture=RIE2.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #2 Methane / Hydr…"
- 07:07, 28 June 2012 diff hist +42 MediaWiki:Sidebar
- 21:53, 27 June 2012 diff hist -2 RIE 2 (MRC)
- 21:49, 27 June 2012 diff hist +13 N File:RIE2.jpg {{toolimage}} current
- 21:48, 27 June 2012 diff hist -4 RIE 2 (MRC)
- 21:47, 27 June 2012 diff hist +2,608 N RIE 2 (MRC) Created page with "{{tool|{{PAGENAME}} |picture=RIE2.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 3 |email=freeborn@ece.ucsb.edu |description = RIE #2 Methane / …"
- 21:24, 27 June 2012 diff hist 0 Stepper 2 (AutoStep 200)
- 21:24, 27 June 2012 diff hist +369 DUV Flood Expose
- 21:23, 27 June 2012 diff hist 0 N File:DUV-System-Spectra.png current
- 21:22, 27 June 2012 diff hist 0 N File:DUV-Spectra-With-Filter.png current
- 21:17, 27 June 2012 diff hist 0 N File:DUV-Spectra-No-Filter.png current
- 21:15, 27 June 2012 diff hist +13 N File:DUV.jpg {{toolimage}} current
- 21:15, 27 June 2012 diff hist +1,085 N DUV Flood Expose Created page with "{{tool|{{PAGENAME}} |picture=DUV.jpg |type = Lithography |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 6 |email=silva@ece.ucsb.edu |description = Deep UV Flood Expose…"
- 21:08, 27 June 2012 diff hist 0 Stepper 1 (GCA 6300)
- 21:06, 27 June 2012 diff hist -1 Stepper 2 (AutoStep 200)
- 21:05, 27 June 2012 diff hist +11 N Category:Manuals Created page with "All Manuals" current
- 21:05, 27 June 2012 diff hist +10 N File:GCA-200-Training-Manual.pdf {{manual}} current
- 21:04, 27 June 2012 diff hist +2,671 N Stepper 2 (AutoStep 200) Created page with "{{tool|{{PAGENAME}} |picture=Stepper1.jpg |type = Lithography |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = GCA 6…"
- 20:58, 27 June 2012 diff hist +29 N Template:Manual Redirected page to Template:Manuals current
- 20:57, 27 June 2012 diff hist +47 N Template:Manuals Created page with "<includeonly>Category:Manuals</includeonly>" current
- 20:57, 27 June 2012 diff hist +11 N File:GCA-6300-Training-Manual.pdf {{manuals}} current
- 20:55, 27 June 2012 diff hist +2,603 N Stepper 1 (GCA 6300) Created page with "{{tool|{{PAGENAME}} |picture=Stepper1.jpg |type = Lithography |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = GCA 6…"
- 18:50, 27 June 2012 diff hist +7 Template:Nav
- 18:49, 27 June 2012 diff hist +1 N Sputter 5 Created page with "f" current
- 18:49, 27 June 2012 diff hist +1 Template:Nav
- 18:03, 27 June 2012 diff hist +10 Category:Dry Etch Redirected page to Tool List#Dry Etch current
- 18:02, 27 June 2012 diff hist +10 Category:Vacuum Deposition Redirected page to Tool List#Vacuum Deposition current
- 18:02, 27 June 2012 diff hist +10 Category:Lithography Redirected page to Tool List#Lithography current
- 18:01, 27 June 2012 diff hist -538 Inspection, Test and Characterization Redirected page to Tool List#Inspection, Test and Characterization current
- 18:01, 27 June 2012 diff hist -140 Packaging Redirected page to Tool List#Packaging current
- 18:01, 27 June 2012 diff hist -164 Thermal Processing Redirected page to Tool List#Thermal Processing current
- 18:00, 27 June 2012 diff hist -168 Wet Processing Redirected page to Tool List#Wet Processing current
- 18:00, 27 June 2012 diff hist -296 Dry Etch Redirected page to Tool List#Dry Etch current
- 18:00, 27 June 2012 diff hist -399 Vacuum Deposition Redirected page to Tool List#Vacuum Deposition current
- 18:00, 27 June 2012 diff hist -231 Lithography Redirected page to Tool List#Lithography current
- 17:59, 27 June 2012 diff hist +22 N Category:Dry Etch Redirected page to Dry Etch
- 17:58, 27 June 2012 diff hist +34 RIE 1 (Custom)
- 17:57, 27 June 2012 diff hist +1,517 N RIE 1 (Custom) Created page with "{{tool|{{PAGENAME}} |picture=e-beam2.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 3 |email=freeborn@ece.ucsb.edu |description = Custom, Loadlo…"
- 17:53, 27 June 2012 diff hist +25 N Category:Lithography Redirected page to Lithography
- 17:52, 27 June 2012 diff hist -6 Stepper 3 (ASML DUV)
- 17:45, 27 June 2012 diff hist +13 N File:ASML.jpg {{toolimage}} current
- 17:45, 27 June 2012 diff hist 0 Template:Tool
- 17:43, 27 June 2012 diff hist +739 N Stepper 3 (ASML DUV) Created page with "{{tool|{{PAGENAME}} |picture=ASML.jpg |type = Vacuum Deposition |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = ASM…"
- 17:40, 27 June 2012 diff hist +7 Tool List →Lithography
- 15:48, 27 June 2012 diff hist +13 N File:E-beam4.jpg {{toolimage}}
- 15:48, 27 June 2012 diff hist 0 E-Beam 4 (CHA)
- 15:48, 27 June 2012 diff hist +1,851 N E-Beam 4 (CHA) Created page with "{{tool|{{PAGENAME}} |picture=e-beam3.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Multi-Wafe…"
- 15:46, 27 June 2012 diff hist -1 E-Beam 3 (Temescal)
- 15:45, 27 June 2012 diff hist +1,734 E-Beam 3 (Temescal)
- 15:43, 27 June 2012 diff hist +13 N File:E-beam3.jpg {{toolimage}}
- 15:42, 27 June 2012 diff hist +26 Template:Tool