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- 13:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 13:28, 17 March 2014 diff hist +4 Sputtering Recipes
- 11:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:44, 12 March 2014 diff hist -241 DUV Flood Expose →Spectra Images
- 11:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
- 14:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 13:51, 11 March 2014 diff hist -58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 13:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV)
- 13:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 13:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
- 10:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH)
- 10:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
- 11:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 11:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx current
- 10:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 10:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf current
- 10:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 10:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf current
- 10:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 10:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf current
- 10:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
- 11:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 11:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 10:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx current
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:42, 24 October 2013 diff hist -238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf current
- 16:38, 24 October 2013 diff hist +130 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:36, 24 October 2013 diff hist +49 Dry Etching Recipes
- 15:25, 24 October 2013 diff hist 0 N File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf current
- 15:25, 24 October 2013 diff hist +168 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:23, 24 October 2013 diff hist +54 Dry Etching Recipes
- 13:40, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf current
- 13:40, 24 October 2013 diff hist +151 ICP Etching Recipes →GaAs-AlGaAs Etch (Panasonic 1)
- 11:34, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf current
- 11:34, 24 October 2013 diff hist +149 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 10:14, 24 October 2013 diff hist 0 N File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf current
- 10:13, 24 October 2013 diff hist +140 ICP Etching Recipes →GaN Etch (Panasonic 1)
- 17:09, 23 October 2013 diff hist +10 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 17:08, 23 October 2013 diff hist +46 Dry Etching Recipes
- 17:05, 23 October 2013 diff hist 0 N File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf current
- 17:05, 23 October 2013 diff hist +121 RIE Etching Recipes →RIE 2 (MRC)
- 17:04, 23 October 2013 diff hist +49 Dry Etching Recipes
- 16:40, 23 October 2013 diff hist 0 N File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf current
- 16:40, 23 October 2013 diff hist +169 RIE Etching Recipes →RIE 2 (MRC)
- 16:40, 23 October 2013 diff hist -168 RIE Etching Recipes →RIE 3 (MRC)
- 16:39, 23 October 2013 diff hist +169 RIE Etching Recipes
- 16:37, 23 October 2013 diff hist +82 Dry Etching Recipes
- 16:19, 23 October 2013 diff hist +48 Dry Etching Recipes
- 16:15, 23 October 2013 diff hist +51 Dry Etching Recipes
- 16:11, 23 October 2013 diff hist 0 N File:Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf current
- 16:11, 23 October 2013 diff hist +122 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:09, 23 October 2013 diff hist +1 Dry Etching Recipes
- 16:09, 23 October 2013 diff hist +54 Dry Etching Recipes
- 09:57, 23 October 2013 diff hist -44 RIE Etching Recipes
- 09:32, 23 October 2013 diff hist +34 RIE Etching Recipes →CdZnTe Etching (RIE 2)
- 09:32, 23 October 2013 diff hist +36 RIE Etching Recipes →AlGaAs Etching (RIE 5)
- 09:31, 23 October 2013 diff hist +36 RIE Etching Recipes →GaN Etching (RIE 5)
- 09:30, 23 October 2013 diff hist +2 ICP Etching Recipes →Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
- 09:29, 23 October 2013 diff hist +45 ICP Etching Recipes →Single-step Si Etching (not Bosch Process!) (Si Deep RIE)
- 09:28, 23 October 2013 diff hist +32 ICP Etching Recipes →Al Etch (Panasonic 1)
- 09:28, 23 October 2013 diff hist +30 ICP Etching Recipes →Cr Etch (Panasonic 1)
- 09:27, 23 October 2013 diff hist +19 ICP Etching Recipes →Ti Etch (Panasonic 1)
- 09:27, 23 October 2013 diff hist +30 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 09:26, 23 October 2013 diff hist +28 ICP Etching Recipes →GaN Etch (Panasonic 1)
- 09:25, 23 October 2013 diff hist +29 ICP Etching Recipes →GaAs Etch (Panasonic 2)
- 09:25, 23 October 2013 diff hist +33 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:24, 23 October 2013 diff hist +56 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:23, 23 October 2013 diff hist +11 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:22, 23 October 2013 diff hist +39 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 09:16, 23 October 2013 diff hist +18 ICP Etching Recipes →InP Etch (H2 Ar)
- 15:05, 22 October 2013 diff hist 0 N File:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf current
- 15:05, 22 October 2013 diff hist 0 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:04, 22 October 2013 diff hist +174 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:01, 22 October 2013 diff hist +48 Dry Etching Recipes
- 13:30, 22 October 2013 diff hist +29 ICP Etching Recipes →SiO2 Etching (Panasonic 1)
- 13:29, 22 October 2013 diff hist +22 ICP Etching Recipes →SiNx Etching (Panasonic 2)
- 13:29, 22 October 2013 diff hist +50 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 13:28, 22 October 2013 diff hist +10 ICP Etching Recipes →SiNx Etching (Panasonic 2)
- 11:42, 22 October 2013 diff hist +48 Dry Etching Recipes
- 11:40, 22 October 2013 diff hist 0 N File:Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf current
- 11:39, 22 October 2013 diff hist +142 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 11:20, 22 October 2013 diff hist +100 ICP Etching Recipes →SiO2 Etching (Panasonic 2)
- 11:18, 22 October 2013 diff hist 0 N File:Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf current
- 15:52, 27 September 2013 diff hist +93 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:51, 27 September 2013 diff hist +48 Dry Etching Recipes
- 15:49, 27 September 2013 diff hist 0 N File:Panasonic-1-Ti-Etch-Deep-RevA.pdf current
- 14:41, 27 September 2013 diff hist -1 Dry Etching Recipes
- 14:03, 27 September 2013 diff hist +46 Dry Etching Recipes
- 14:03, 27 September 2013 diff hist +134 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 11:56, 27 September 2013 diff hist 0 ICP Etching Recipes →Al Etch (Panasonic 1)
- 11:54, 27 September 2013 diff hist 0 ICP Etching Recipes →Al Etch (Panasonic 1)
- 11:53, 27 September 2013 diff hist 0 N File:Panasonic-1-Al-Etch-RevA.pdf current
- 11:51, 27 September 2013 diff hist +2 Dry Etching Recipes
- 11:50, 27 September 2013 diff hist +47 Dry Etching Recipes
- 11:49, 27 September 2013 diff hist +83 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:00, 27 September 2013 diff hist +11 ICP Etching Recipes →SiO2 Etching (Panasonic 1)
- 11:49, 30 August 2013 diff hist +16 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 11:48, 30 August 2013 diff hist -6 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:47, 30 August 2013 diff hist -1 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:47, 30 August 2013 diff hist -161 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 11:22, 30 August 2013 diff hist +48 Dry Etching Recipes
- 11:20, 30 August 2013 diff hist +102 ICP Etching Recipes →SiO2 Vertical Etch (Panasonic 1)
- 11:19, 30 August 2013 diff hist +161 ICP Etching Recipes →SiO2 Vertical Etch (Panasonic 1)
- 11:16, 30 August 2013 diff hist 0 N File:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf current
- 10:14, 29 July 2013 diff hist +8 Lithography Recipes →Low-K Dielectric
- 10:14, 29 July 2013 diff hist +40 Lithography Recipes →Low-K Dielectric
- 17:19, 18 July 2013 diff hist -6,773 Lithography Recipes →Legacy Table
- 17:19, 18 July 2013 diff hist +6,771 N LegacyTable Created page with "== Legacy Table == {{Recipe Table Explanation}} {| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center;" class="wikitable" |- bgcolor="#..." current
- 16:26, 18 July 2013 diff hist +16 Lithography Recipes →Holography Recipes
- 16:20, 18 July 2013 diff hist +42 Lithography Recipes →Chemical Datasheets
- 16:08, 18 July 2013 diff hist +118 Lithography Recipes →Holography Recipes
- 16:06, 18 July 2013 diff hist 0 N File:Holography-Process-Variation-revA.pdf current
- 16:05, 18 July 2013 diff hist 0 N File:Holography-Process-Gratings-revA.pdf current
- 15:47, 18 July 2013 diff hist +100 Lithography Recipes
- 15:46, 18 July 2013 diff hist +165 Lithography Recipes →General Information
- 14:44, 18 July 2013 diff hist -20 Lithography Recipes →Photolithography Recipes
- 14:38, 18 July 2013 diff hist +10 Lithography Recipes →Nanoimprinting
- 14:37, 18 July 2013 diff hist 0 N File:Thermal-Nanoimprint-Process-Tutorial-revA.pdf current
- 14:37, 18 July 2013 diff hist +65 Lithography Recipes →Nanoimprinting
- 16:50, 16 July 2013 diff hist +21 Lithography Recipes →Legacy Table
- 16:48, 16 July 2013 diff hist +1 Lithography Recipes →E-Beam Lithography Recipes
- 16:48, 16 July 2013 diff hist +35 Lithography Recipes
- 16:46, 16 July 2013 diff hist +2 Lithography Recipes →Nanoimprinting
- 16:45, 16 July 2013 diff hist +98 Lithography Recipes
- 16:40, 16 July 2013 diff hist -2,184 Lithography Recipes →Photolithography Recipes
- 16:35, 16 July 2013 diff hist -383 Template:LithRecipe Table
- 16:34, 16 July 2013 diff hist +891 Template:LithRecipe Table v2 current
- 16:33, 16 July 2013 diff hist +4 N Template:LithRecipe Table v2 Created page with "test"
- 16:44, 12 July 2013 diff hist +8,742 Lithography Recipes
- 17:24, 10 July 2013 diff hist -4 Stepper Recipes →Negative Resist (AutoStep 200)
- 17:12, 10 July 2013 diff hist -9 Stepper Recipes
- 17:03, 10 July 2013 diff hist -87 Lithography Recipes
- 16:58, 10 July 2013 diff hist +10 Lithography Recipes
- 16:58, 10 July 2013 diff hist 0 N File:RemoverPG-revA.pdf current
- 16:56, 10 July 2013 diff hist 0 Lithography Recipes
- 16:55, 10 July 2013 diff hist +9 Lithography Recipes
- 16:55, 10 July 2013 diff hist 0 N File:OMNICOAT-revA.pdf current
- 16:52, 10 July 2013 diff hist +20 Lithography Recipes
- 16:52, 10 July 2013 diff hist 0 N File:SU-8-2075-revA.pdf current
- 16:51, 10 July 2013 diff hist 0 N File:SU-8-2015-revA.pdf current
- 16:51, 10 July 2013 diff hist +18 Lithography Recipes
- 16:46, 10 July 2013 diff hist +42 Lithography Recipes
- 16:45, 10 July 2013 diff hist 0 N File:512B-Application-Data-Bake-revA.pdf current
- 16:45, 10 July 2013 diff hist 0 N File:512B-Datasheet-revA.pdf current
- 16:45, 10 July 2013 diff hist +42 Lithography Recipes
- 16:38, 10 July 2013 diff hist +38 Lithography Recipes
- 16:37, 10 July 2013 diff hist 0 N File:BCB-cyclotene-4000-revA.pdf current
- 16:37, 10 July 2013 diff hist 0 N File:BCB-cyclotene-3000-revA.pdf current
- 16:33, 10 July 2013 diff hist +564 Lithography Recipes
- 16:10, 10 July 2013 diff hist +5 ICP Etching Recipes
- 16:10, 10 July 2013 diff hist 0 N File:Panasonic-1-Cr-Etch-revA.pdf current
- 15:34, 10 July 2013 diff hist +4 ICP Etching Recipes
- 15:33, 10 July 2013 diff hist -3 ICP Etching Recipes
- 11:36, 10 July 2013 diff hist -714 Brian Thibeault
- 13:59, 18 June 2013 diff hist +2 Dry Etching Recipes
- 13:55, 18 June 2013 diff hist +26 ICP Etching Recipes
- 13:54, 18 June 2013 diff hist +50 ICP Etching Recipes
- 13:52, 18 June 2013 diff hist +46 Dry Etching Recipes
- 11:03, 14 June 2013 diff hist -14 Brian Lingg
- 11:02, 14 June 2013 diff hist -14 Luis Zuzunaga
- 11:02, 14 June 2013 diff hist -12 Biljana Stamenic
- 11:01, 14 June 2013 diff hist -14 Tom Reynolds
- 11:01, 14 June 2013 diff hist -14 Aidan Hopkins
- 11:01, 14 June 2013 diff hist -14 Don Freeborn
- 11:00, 14 June 2013 diff hist -14 Adam Abrahamsen
- 10:59, 14 June 2013 diff hist -102 Template:Tool
- 10:56, 14 June 2013 diff hist -14 Template:Tool
- 17:12, 13 June 2013 diff hist -126 Staff List
- 09:23, 23 May 2013 diff hist -250 Template:News
- 09:22, 23 May 2013 diff hist -19 Template:News
- 17:07, 22 April 2013 diff hist +96 Lithography Recipes
- 17:06, 22 April 2013 diff hist +50 Lithography Recipes
- 17:03, 22 April 2013 diff hist +31 Stepper Recipes
- 17:01, 22 April 2013 diff hist -762 Stepper Recipes
- 16:56, 22 April 2013 diff hist -594 Stepper Recipes
- 16:55, 22 April 2013 diff hist -11 Stepper Recipes
- 16:54, 22 April 2013 diff hist -5 Stepper Recipes
- 16:49, 22 April 2013 diff hist -66 Stepper Recipes
- 15:58, 22 April 2013 diff hist +4,310 Stepper Recipes
- 15:54, 22 April 2013 diff hist -222 Contact Alignment Recipes
- 15:50, 22 April 2013 diff hist +692 Contact Alignment Recipes
- 15:42, 22 April 2013 diff hist +766 Stepper Recipes
- 15:04, 22 April 2013 diff hist +10 Lithography Recipes
- 15:02, 22 April 2013 diff hist -1 Lithography Recipes
- 15:02, 22 April 2013 diff hist +229 Lithography Recipes
- 14:52, 22 April 2013 diff hist +21 Lithography Recipes
- 14:24, 22 April 2013 diff hist +172 Lithography Recipes
- 14:22, 22 April 2013 diff hist 0 N File:UV210-Positive-Resist-Datasheet.pdf current
- 14:20, 22 April 2013 diff hist 0 N File:DS-K101-Anti-Reflective-Coating.pdf current
- 14:20, 22 April 2013 diff hist 0 N File:AR2-Anti-Reflective-Coating.pdf current
- 14:18, 22 April 2013 diff hist 0 N File:UVN2300-Negative-Resist-Datasheet.pdf current
- 14:17, 22 April 2013 diff hist +59 Lithography Recipes
- 14:16, 22 April 2013 diff hist +67 N File:UVN30-Negative-Ressit-Datasheet.pdf Negative resist for ASML Stepper - UVN2300 requires higher exposure current
- 13:58, 22 April 2013 diff hist +184 Lithography Recipes
- 13:54, 22 April 2013 diff hist +50 N File:UV6-Positive-Resist-Datasheet.pdf Datasheet for UV6 positive resist for ASML stepper current
- 10:36, 13 November 2012 diff hist +3 Contact Alignment Recipes →Positive Resist (MA-6)
- 10:33, 13 November 2012 diff hist -139 Contact Alignment Recipes →Positive Resist (MA-6)
- 10:29, 13 November 2012 diff hist -152 Contact Alignment Recipes →Notes
- 08:54, 28 June 2012 diff hist +26 Stepper 1 (GCA 6300)
- 13:51, 27 June 2012 diff hist -27 E-Beam 3 (Temescal)
- 13:51, 27 June 2012 diff hist +33 N E-Beam 3 (Temescal) Created page with " frame|center"