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- 10:46, 9 July 2015 diff hist +30 Tool List →Dry Etch
- 16:47, 10 April 2015 diff hist +3 Stepper 3 (ASML DUV) →Operating Procedures
- 16:47, 10 April 2015 diff hist 0 N File:ASML Job Set-Up Guide v2.pdf current
- 17:27, 2 April 2015 diff hist -5 Stepper 3 (ASML DUV)
- 17:26, 2 April 2015 diff hist 0 N File:ASML Mask Making Guidelines.pdf current
- 17:25, 2 April 2015 diff hist +67 Stepper 3 (ASML DUV) →Operating Procedures
- 10:47, 25 February 2015 diff hist 0 Lithography Recipes →Photolithography Recipes
- 10:46, 25 February 2015 diff hist 0 Lithography Recipes
- 12:57, 24 December 2014 diff hist +157 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 12:41, 23 December 2014 diff hist 0 N File:SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf current
- 12:00, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf current
- 12:00, 23 December 2014 diff hist +23 Sputtering Recipes →SiO2 Deposition (Sputter 3)
- 11:44, 23 December 2014 diff hist +212 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:07, 23 December 2014 diff hist 0 N File:SiO2-AJA-1-Reactive-Sputter-Uniformity-rev-1.pdf current
- 11:06, 23 December 2014 diff hist +216 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:02, 23 December 2014 diff hist +317 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:45, 22 December 2014 diff hist +37 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:42, 22 December 2014 diff hist 0 N File:Ti-Au-Sputtering-Films-AJA2-rev1.pdf current
- 11:42, 22 December 2014 diff hist +95 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 11:39, 22 December 2014 diff hist +213 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 11:27, 22 December 2014 diff hist 0 N File:Sputter-2-AlN-Endeavor-rev1.pdf current
- 11:27, 22 December 2014 diff hist -4 Sputtering Recipes →AlNx Deposition (Sputter 2)
- 16:25, 15 April 2014 diff hist +499 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 15:36, 1 April 2014 diff hist +19 PECVD 1 (PlasmaTherm 790) →Documentation
- 15:19, 1 April 2014 diff hist -71 Sputter 4 (AJA ATC 2200-V) →Documentation
- 14:08, 1 April 2014 diff hist +24 Nano-Imprint (Nanonex NX2000) →About
- 14:07, 1 April 2014 diff hist +51 Nano-Imprint (Nanonex NX2000) →About
- 13:56, 1 April 2014 diff hist +102 Stepper 2 (AutoStep 200) →About
- 13:54, 1 April 2014 diff hist -9 Stepper 1 (GCA 6300) →About
- 16:34, 21 March 2014 diff hist +139 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 16:34, 21 March 2014 diff hist +140 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:32, 21 March 2014 diff hist +128 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:27, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevB.pdf current
- 16:27, 21 March 2014 diff hist 0 Sputtering Recipes →W-TiW Deposition (Sputter 4)
- 16:14, 21 March 2014 diff hist +3 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:09, 21 March 2014 diff hist +4 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 16:08, 21 March 2014 diff hist 0 N File:W-TiW-Sputtering-AJA-4-Data-Recipe-RevA.pdf current
- 16:08, 21 March 2014 diff hist +3 Sputtering Recipes →W Deposition (Sputter 4)
- 11:12, 21 March 2014 diff hist 0 N File:Argon-ion-beam-etching-ebeam1-procedure-data-revA.pdf current
- 11:12, 21 March 2014 diff hist 0 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 11:11, 21 March 2014 diff hist +108 E-Beam Evaporation Recipes →Ar-Ion Beam Source
- 10:54, 21 March 2014 diff hist -27 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 10:54, 21 March 2014 diff hist +50 E-Beam Evaporation Recipes →E-Beam 1 (Sharon)
- 15:36, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:36, 18 March 2014 diff hist 0 N File:Al-AFM-Variation-Deposition-Rate-Rev1.pdf current
- 15:36, 18 March 2014 diff hist +105 E-Beam Evaporation Recipes →Aluminum Deposition
- 15:19, 18 March 2014 diff hist +111 E-Beam Evaporation Recipes
- 15:18, 18 March 2014 diff hist -112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:17, 18 March 2014 diff hist 0 N File:Al-thickness-variation-with-rate.jpg current
- 15:16, 18 March 2014 diff hist +112 E-Beam Evaporation Recipes →E-Beam 4 (CHA)
- 15:00, 18 March 2014 diff hist +140 E-Beam Evaporation Recipes
- 14:55, 18 March 2014 diff hist +2 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 14:54, 18 March 2014 diff hist 0 N File:Vapor-Pressure-Chart-2.xlsx current
- 14:52, 18 March 2014 diff hist 0 File:Vapor-Pressure-Chart.xlsx Thibeault uploaded a new version of "File:Vapor-Pressure-Chart.xlsx" current
- 14:49, 18 March 2014 diff hist +18 N File:Vapor-Pressure-Chart.xlsx alphabetical order
- 11:46, 18 March 2014 diff hist +7 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:45, 18 March 2014 diff hist -36 E-Beam Evaporation Recipes →Materials Table (E-Beam #4)
- 11:44, 18 March 2014 diff hist +35 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:42, 18 March 2014 diff hist +3 E-Beam Evaporation Recipes →Materials Table (E-Beam #2)
- 11:40, 18 March 2014 diff hist +66 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:32, 18 March 2014 diff hist -65 E-Beam Evaporation Recipes →Materials Table (E-Beam #1)
- 11:26, 18 March 2014 diff hist -35 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:24, 18 March 2014 diff hist +13 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:19, 18 March 2014 diff hist +93 E-Beam Evaporation Recipes →Vapor Pressure Chart
- 11:18, 18 March 2014 diff hist +25 E-Beam Evaporation Recipes
- 13:41, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:40, 17 March 2014 diff hist +18 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 13:39, 17 March 2014 diff hist +309 Sputtering Recipes →Sputter 4 (AJA ATC 2200-V)
- 13:38, 17 March 2014 diff hist -26 Sputtering Recipes →Sputter 3 Process Table
- 13:35, 17 March 2014 diff hist -599 Sputtering Recipes →Sputter 3 Process Table
- 13:34, 17 March 2014 diff hist -93 Sputtering Recipes →Sputter 3 Process Table
- 13:30, 17 March 2014 diff hist -1 Sputtering Recipes →Sputter 3 Process Table
- 13:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 13:28, 17 March 2014 diff hist +4 Sputtering Recipes
- 11:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:44, 12 March 2014 diff hist -241 DUV Flood Expose →Spectra Images
- 11:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
- 14:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 13:51, 11 March 2014 diff hist -58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 13:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV)
- 13:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 13:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
- 10:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH)
- 10:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
- 11:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 11:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx current
- 10:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 10:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf current
- 10:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 10:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf current
- 10:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 10:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf current
- 10:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
- 11:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 11:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 10:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx current
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:42, 24 October 2013 diff hist -238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf current