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- 10:43, 18 May 2022 diff hist +247 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher still a low etch rate on new fl cal Tag: Visual edit
- 10:41, 18 May 2022 diff hist 0 N File:SiO2 Fl 10 CS 007.jpg current
- 10:41, 18 May 2022 diff hist 0 N File:SiO2 Fl 10 45D-003.jpg current
- 10:48, 12 May 2022 diff hist +186 m Oxford ICP Etcher - Process Control Data added new cal to oxford 60c Tag: Visual edit
- 10:47, 12 May 2022 diff hist 0 N File:Oxford 60c 10 CS 008.jpg current
- 10:47, 12 May 2022 diff hist 0 N File:Oxford 60c 10 45D 003.jpg current
- 09:02, 12 May 2022 diff hist +39 m Oxford ICP Etcher - Process Control Data started to enter new cal on oxford60c Tag: Visual edit
- 10:36, 11 May 2022 diff hist +16 m Test Data of etching SiO2 with CHF3/CF4 added selectivity to ICP2 cals Tag: Visual edit
- 10:33, 11 May 2022 diff hist +241 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher addded entry to fl cals, added selectivity. etch rate is 10% lower Tag: Visual edit
- 10:28, 11 May 2022 diff hist 0 N File:SiO2 Fl 09 CS 006.jpg current
- 10:28, 11 May 2022 diff hist 0 N File:SiO2 Fl 09 45D 005.jpg current
- 10:24, 11 May 2022 diff hist +227 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry in ICP1 cals, added selectivity Tag: Visual edit
- 10:20, 11 May 2022 diff hist 0 N File:ICP1 07 CS 006.jpg current
- 10:20, 11 May 2022 diff hist 0 N File:ICP1 07 45D 008.jpg current
- 08:58, 10 May 2022 diff hist 0 m Test Data of etching SiO2 with CHF3/CF4 fixed typo on icp2 cals Tag: Visual edit
- 12:01, 5 May 2022 diff hist +233 m Oxford ICP Etcher - Process Control Data added new entry to oxford 60c cal Tag: Visual edit
- 11:59, 5 May 2022 diff hist 0 N File:InP Oxford 60c 09 CS 005.jpg current
- 11:59, 5 May 2022 diff hist 0 N File:InP Oxford 60c 09 45D 005.jpg current
- 11:53, 5 May 2022 diff hist +264 Test Data of etching SiO2 with CHF3/CF4 Added new entry to ICP2 cals -- after chuck temperature was lowered Tag: Visual edit
- 11:51, 5 May 2022 diff hist 0 N File:ICP2 07 CS 005.jpg current
- 11:50, 5 May 2022 diff hist 0 N File:ICP2 07 45D 002.jpg current
- 09:09, 4 May 2022 diff hist +220 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry to FL cals Tag: Visual edit
- 09:08, 4 May 2022 diff hist 0 N File:SiO2 Fl 08 CS 005.jpg current
- 09:07, 4 May 2022 diff hist 0 N File:SiO2 Fl 08 45D 004.jpg current
- 14:15, 28 April 2022 diff hist +220 m Unaxis VLR Etch - Process Control Data added new entry to unaxis cals Tag: Visual edit
- 14:13, 28 April 2022 diff hist 0 N File:Unaxis 03 CS 003.jpg current
- 14:12, 28 April 2022 diff hist 0 N File:Unaxis 03 45D 003.jpg current
- 14:09, 28 April 2022 diff hist +202 m Oxford ICP Etcher - Process Control Data added entry to Oxford 60c cals Tag: Visual edit
- 14:04, 28 April 2022 diff hist 0 N File:Oxford 60c 08 CS 009.jpg current
- 14:04, 28 April 2022 diff hist 0 N File:Oxford 60c 08 45D 003.jpg current
- 11:08, 27 April 2022 diff hist +3,202 m Unaxis VLR Etch - Process Control Data merged the two sets of ICP cal data Tag: Visual edit
- 13:32, 26 April 2022 diff hist +299 m Oxford ICP Etcher - Process Control Data added new entry to oxford 60c cal Tag: Visual edit
- 13:31, 26 April 2022 diff hist 0 N File:Oxford 60c 07 CS 001.jpg current
- 13:30, 26 April 2022 diff hist 0 N File:Oxford 60c 07 45D 002.jpg current
- 13:27, 26 April 2022 diff hist +215 m Test Data of etching SiO2 with CHF3/CF4 added new entry to ICP2 cals Tag: Visual edit
- 13:26, 26 April 2022 diff hist 0 N File:ICP2 06 CS 001.jpg current
- 13:26, 26 April 2022 diff hist 0 N File:ICP2 06 45D 002.jpg current
- 13:24, 26 April 2022 diff hist +213 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry to ICP1 cals Tag: Visual edit
- 13:23, 26 April 2022 diff hist 0 N File:ICP1 06 CS 002.jpg current
- 13:22, 26 April 2022 diff hist 0 N File:ICP1 06 45D 002.jpg current
- 11:20, 21 April 2022 diff hist +13 m Unaxis VLR Etch - Process Control Data edited recipe on Unaxis Process control data Tag: Visual edit
- 11:17, 21 April 2022 diff hist +3 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher fixed typo Tag: Visual edit
- 11:09, 21 April 2022 diff hist +219 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry to FL cals Tag: Visual edit
- 11:08, 21 April 2022 diff hist 0 N File:SiO2 Fl 07 CS 004.jpg current
- 11:07, 21 April 2022 diff hist 0 N File:SiO2 Fl 07 45D 003.jpg current
- 11:02, 21 April 2022 diff hist +210 m Test Data of etching SiO2 with CHF3/CF4 added new entry to ICP2 cals Tag: Visual edit
- 11:01, 21 April 2022 diff hist 0 N File:ICP2 05 CS 001.jpg current
- 11:00, 21 April 2022 diff hist 0 N File:ICP2 05 45D 003.jpg current
- 10:58, 21 April 2022 diff hist +211 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry to ICP1 cals Tag: Visual edit
- 10:57, 21 April 2022 diff hist 0 N File:ICP1 05 CS 002.jpg current
- 10:56, 21 April 2022 diff hist 0 N File:ICP1 05 45D 001.jpg current
- 11:36, 20 April 2022 diff hist -19 m Unaxis VLR Etch - Process Control Data started to enter etch recipe in to cal table Tag: Visual edit
- 11:34, 20 April 2022 diff hist +382 m Unaxis VLR Etch - Process Control Data added new entries for Unaxis cals Tag: Visual edit
- 11:33, 20 April 2022 diff hist 0 N File:Unaxis 02 CS 002.jpg current
- 11:30, 20 April 2022 diff hist 0 N File:Unaxis 02 CS 004.jpg current
- 11:30, 20 April 2022 diff hist 0 N File:Unaxis 02 45D 002.jpg current
- 11:29, 20 April 2022 diff hist 0 N File:Unaxis 01 45D 002.jpg current
- 11:29, 20 April 2022 diff hist 0 N File:Unaxis 01 CS 001.jpg current
- 11:19, 20 April 2022 diff hist +325 m Oxford ICP Etcher - Process Control Data added entry in Oxford 60c cals Tag: Visual edit
- 11:17, 20 April 2022 diff hist 0 N File:Oxford 60c 06 45D 002.jpg current
- 11:16, 20 April 2022 diff hist 0 N File:Oxford 60c 06 CS 005.jpg current
- 11:14, 20 April 2022 diff hist -8 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher new SEM on SiO2_Fl_03 Tag: Visual edit
- 11:12, 20 April 2022 diff hist 0 N File:SiO2 Fl 03 CS 004.jpg current
- 12:58, 19 April 2022 diff hist +242 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry to Fl cals Tag: Visual edit
- 12:56, 19 April 2022 diff hist 0 N File:SiO2 Fl 06 CS 002.jpg current
- 12:56, 19 April 2022 diff hist 0 N File:SiO2 Fl 06 45D 002.jpg current
- 12:52, 19 April 2022 diff hist +207 m Oxford ICP Etcher - Process Control Data added entry in Oxford, updated selectivity numbers Tag: Visual edit
- 12:48, 19 April 2022 diff hist 0 N File:Oxford 60c 05 CS 002.jpg current
- 12:48, 19 April 2022 diff hist 0 N File:Oxford 60c 05 45D 004.jpg current
- 10:32, 14 April 2022 diff hist +216 m Test Data of etching SiO2 with CHF3/CF4 added entry to ICP2 cals Tag: Visual edit
- 10:30, 14 April 2022 diff hist 0 N File:ICP2 004 CS 003.jpg current
- 10:29, 14 April 2022 diff hist 0 N File:ICP2 004 45D 001.jpg current
- 10:26, 14 April 2022 diff hist +215 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry in ICP1 cals Tag: Visual edit
- 10:25, 14 April 2022 diff hist 0 N File:ICP1 004 CS 001.jpg current
- 10:25, 14 April 2022 diff hist 0 N File:ICP1 004 45D 004.jpg current
- 13:22, 13 April 2022 diff hist -3 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher made more recent cals on top for Fl Etcher Tag: Visual edit
- 13:20, 13 April 2022 diff hist 0 m Oxford ICP Etcher - Process Control Data made more recent cals on top of table for Oxford Tag: Visual edit
- 13:16, 13 April 2022 diff hist 0 m Test Data of etching SiO2 with CHF3/CF4 made more recent cals on top of table for ICP2 Tag: Visual edit
- 13:14, 13 April 2022 diff hist +2 m Test Data of etching SiO2 with CHF3/CF4-ICP1 made more recent cals on top of table for iCP1 Tag: Visual edit
- 11:16, 12 April 2022 diff hist +17 m Oxford ICP Etcher - Process Control Data added comment Tag: Visual edit
- 08:46, 31 March 2022 diff hist +225 m Oxford ICP Etcher - Process Control Data added entry to oxford 60c cals Tag: Visual edit
- 08:45, 31 March 2022 diff hist 0 N File:Oxford 60c 04 CS 004.jpg current
- 08:44, 31 March 2022 diff hist 0 N File:Oxford 60c 04 45D 001.jpg current
- 10:29, 30 March 2022 diff hist +238 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry in Fl Etcher, added selectivity to recent Cals Tag: Visual edit
- 10:26, 30 March 2022 diff hist 0 N File:SiO2 Fl 05 CS 002.jpg current
- 10:25, 30 March 2022 diff hist 0 N File:SiO2 Fl 03 45D 002.jpg current
- 10:16, 30 March 2022 diff hist +223 m Test Data of etching SiO2 with CHF3/CF4 added entry to ICP2, added selectivity for recent cals Tag: Visual edit
- 10:16, 30 March 2022 diff hist 0 N File:ICP2 03 45D 002.jpg current
- 10:15, 30 March 2022 diff hist 0 N File:ICP2 03 CS 003.jpg current
- 10:09, 30 March 2022 diff hist +12 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added selectivity to recent ICP1 cals Tag: Visual edit
- 10:03, 30 March 2022 diff hist +212 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry in ICP1 Tag: Visual edit
- 10:02, 30 March 2022 diff hist 0 N File:ICP1 03 CS 005.jpg current
- 10:01, 30 March 2022 diff hist 0 N File:ICP1 03 45D 002.jpg current
- 10:42, 9 March 2022 diff hist +210 m Test Data of etching SiO2 with CHF3/CF4 added entry to ICP2 historical data Tag: Visual edit
- 10:42, 9 March 2022 diff hist 0 N File:ICP2 02 CS 004.jpg current
- 10:41, 9 March 2022 diff hist 0 N File:ICP2 02 45D 001.jpg current
- 10:39, 9 March 2022 diff hist +212 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry to ICP1 historical data Tag: Visual edit
- 10:38, 9 March 2022 diff hist 0 N File:ICP1 02 CS 002.jpg current
- 10:38, 9 March 2022 diff hist 0 N File:ICP1 02 45D 001.jpg current
- 10:35, 9 March 2022 diff hist +455 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added entry to Fl historical data (wiht new table for 90s cals) Tag: Visual edit
- 10:34, 9 March 2022 diff hist 0 N File:SiO2 Fl 04 CS 005.jpg current
- 10:33, 9 March 2022 diff hist 0 N File:SiO2 FL 04 45D 001.jpg current
- 12:09, 8 March 2022 diff hist +212 m Test Data of etching SiO2 with CHF3/CF4 added entry to ICP2 historical data Tag: Visual edit
- 12:09, 8 March 2022 diff hist 0 N File:ICP2 01 CS 007.jpg current
- 12:08, 8 March 2022 diff hist 0 N File:ICP2 01 45D 002.jpg current
- 12:05, 8 March 2022 diff hist +212 m Test Data of etching SiO2 with CHF3/CF4-ICP1 added entry to ICP1 historical data Tag: Visual edit
- 12:04, 8 March 2022 diff hist 0 N File:ICP1 01 CS 003.jpg current
- 12:04, 8 March 2022 diff hist 0 N File:ICP1 01 45D 001.jpg current
- 11:56, 8 March 2022 diff hist +190 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher added new entry + SEM into Fl etcher historical data Tag: Visual edit
- 11:55, 8 March 2022 diff hist 0 N File:SiO2 Fl 03 CS 001.jpg current
- 11:55, 8 March 2022 diff hist 0 N File:SiO2 Fl 03 45D 001.jpg current
- 10:59, 2 March 2022 diff hist +504 m Test Data of Etching SiO2 with CHF3/CF4-Fluorine ICP Etcher Added SEMs and some notes to new etch cals done on FL etcher Tag: Visual edit
- 10:57, 2 March 2022 diff hist 0 N File:SiO2 Fl 01 45D 002.jpg current
- 10:55, 2 March 2022 diff hist 0 N File:SiO2 Fl 02 CS 001.jpg current
- 10:55, 2 March 2022 diff hist 0 N File:SiO2 Fl 02 45D 001.jpg current
- 08:33, 15 February 2022 diff hist -15 m Oxford ICP Etcher - Process Control Data added new images Tag: Visual edit
- 08:33, 15 February 2022 diff hist 0 N File:Oxford Cal 01 26 22 New002 CS 002.jpg current
- 08:31, 15 February 2022 diff hist +109 m Oxford ICP Etcher - Process Control Data updated etch rates and selectivity Tag: Visual edit
- 08:13, 15 February 2022 diff hist -79 m Oxford ICP Etcher - Process Control Data updated images Tag: Visual edit
- 08:11, 15 February 2022 diff hist +88 m Oxford ICP Etcher - Process Control Data updated some images Tag: Visual edit
- 08:10, 15 February 2022 diff hist 0 N File:Oxford Cal 01 26 22 031New CS 001.jpg current
- 08:07, 15 February 2022 diff hist 0 N File:Oxford Cal 01 26 22 003New 45d 001.jpg current
- 11:11, 8 February 2022 diff hist +318 m Oxford ICP Etcher - Process Control Data Added etch rate as well as SEMs for 1x1cm pieces Tag: Visual edit
- 11:09, 8 February 2022 diff hist 0 N File:Oxford Cal 1 26 22 003 CS007.jpg current
- 11:05, 8 February 2022 diff hist 0 N File:Oxford Cal 1 26 22 001 CS 004.jpg current
- 11:03, 8 February 2022 diff hist 0 N File:Oxford Cal 1 26 22 003 45D 002.jpg current
- 10:59, 8 February 2022 diff hist 0 N File:Oxford Cal 1 26 22 001 45D 005.jpg current
- 12:10, 1 February 2022 diff hist +140 m Oxford ICP Etcher - Process Control Data added new data, also changed units from nm to um Tag: Visual edit
- 12:09, 1 February 2022 diff hist 0 N File:Oxford Etch InP Cal SEM - quarter wafer - CS 005.jpg current
- 11:36, 1 February 2022 diff hist +100 Oxford ICP Etcher - Process Control Data link to dummy image Tag: Visual edit
- 11:35, 1 February 2022 diff hist 0 N File:Oxford InP Cal - SEM 45D 001.jpg current
- 11:31, 1 February 2022 diff hist +57 m Oxford ICP Etcher - Process Control Data testing Tag: Visual edit
- 11:29, 1 February 2022 diff hist +7 m Oxford ICP Etcher - Process Control Data added data Tag: Visual edit