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- 14:51, 23 January 2023 diff hist +87 Wafer scanning process traveler Tag: Visual edit
- 14:46, 23 January 2023 diff hist +111 Step Profilometer (DektakXT) note about 6M --> XT upgrade Tag: Visual edit
- 11:29, 23 January 2023 diff hist +157 Wafer scanning process traveler →Selecting a Haze range: added example Tag: Visual edit
- 11:27, 23 January 2023 diff hist -5,719 Wafer scanning process traveler deleted claibration and SPC sections (not installed) Tag: Visual edit
- 11:26, 23 January 2023 diff hist +14 m Wafer scanning process traveler Tag: Visual edit
- 11:24, 23 January 2023 diff hist +335 Wafer scanning process traveler →Scanning procedure for 4" Si wafers ( right indexer): added "run process step" section Tag: Visual edit
- 09:12, 23 January 2023 diff hist +339 Suss Aligners (SUSS MJB-3) added info on IR Aligner Tag: Visual edit
- 13:00, 20 January 2023 diff hist +101 ICP Etching Recipes →Process Control Data (Panasonic 2): header for Sio2 etch data Tag: Visual edit
- 12:59, 20 January 2023 diff hist +149 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): added placeholder for cleaning recipes Tag: Visual edit
- 12:56, 20 January 2023 diff hist +157 Process Group - Process Control Data increased all heading levels to get HR's between Dep/Etch sections Tag: Visual edit: Switched
- 12:50, 20 January 2023 diff hist +969 Process Group - Process Control Data →Oxford PlasmaPro Cobra Etcher: link to new Google sheets data (ND's) Tag: Visual edit: Switched
- 12:49, 20 January 2023 diff hist +831 ICP Etching Recipes →Oxford ICP Etcher (PlasmaPro 100 Cobra): link to ND's new Google sheets SPC data, removed "old" data, added example SPC image with link to gSheets Tag: Visual edit: Switched
- 12:46, 20 January 2023 diff hist +39 N File:Oxford-ICP-Etch Process Control Data Example.jpg current
- 12:39, 20 January 2023 diff hist +713 Process Group - Process Control Data →Panasonic ICP#2: lins to new google sheets data Tag: Visual edit: Switched
- 12:37, 20 January 2023 diff hist +551 ICP Etching Recipes →ICP Etch 2 (Panasonic E640): link to google sheets SPC, added example plot w/ link to sheets, removed "Old data" Tag: Visual edit: Switched
- 12:34, 20 January 2023 diff hist +38 N File:ICP2 Process Control Data Example.jpg current
- 12:30, 20 January 2023 diff hist +46 m ICP Etching Recipes →ICP Etch 1 (Panasonic E626I): added CLeaning recipes "to be added" Tag: Visual edit
- 12:29, 20 January 2023 diff hist -2 m ICP Etching Recipes →Process Control Data (Panasonic 1)
- 12:29, 20 January 2023 diff hist -2 m Process Group - Process Control Data →Panasonic ICP #1
- 12:28, 20 January 2023 diff hist +1,189 Process Group - Process Control Data →Etching (Process Control Data): FL-ICP example chart with link to live charts Tag: Visual edit: Switched