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- 14:36, 31 October 2017 diff hist +6 m Sputter 4 (AJA ATC 2200-V) bolded signupmonkey link Tag: Visual edit
- 14:36, 31 October 2017 diff hist +153 Sputter 4 (AJA ATC 2200-V) added singupmonkey link for currently installed targets Tag: Visual edit
- 14:34, 31 October 2017 diff hist +161 Sputter 3 (AJA ATC 2000-F) Added link to signupmnkey page for currently installed targets Tag: Visual edit
- 17:31, 12 October 2017 diff hist +1 m Thermal Evaporator 1 added missing { current
- 21:23, 8 October 2017 diff hist +13 m PECVD Recipes →OTHER recipes: LS SiN and SiOxNy deposition (PECVD #1): added "low stress' text Tag: Visual edit
- 22:06, 7 October 2017 diff hist +46 m PECVD Recipes →LS SiN deposition (PECVD #2): added text “low stress” for clarity and google searches Tag: Visual edit
- 00:55, 7 October 2017 diff hist +10 m ICP Etching Recipes →SiO2 Etching (Panasonic 2): referred "SiOVert" Tag: Visual edit
- 00:54, 7 October 2017 diff hist +40 m ICP Etching Recipes →SiO2 Etching (Panasonic 1): referred to "SiOVert", the colloquial name for this "std." provided recipe. Tag: Visual edit: Switched
- 00:50, 7 October 2017 diff hist +1 m ICP Etching Recipes →Bosch and Release Etch (Si Deep RIE): >>1µm Tag: Visual edit
- 00:49, 7 October 2017 diff hist +15 m Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) minor
- 00:46, 7 October 2017 diff hist +28 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Recipes: link to ICP Etching / recipes section Tag: Visual edit: Switched
- 00:39, 7 October 2017 diff hist +357 ICP Etching Recipes →Bosch and Release Etch (Si Deep RIE): added basic info about bosch process, including new IBD Al2O3 etch selectivity info. Tag: Visual edit
- 22:26, 3 October 2017 diff hist -2 m Template:Nav processes --> recipes
- 14:18, 22 September 2017 diff hist +3 m Dry Etching Recipes Added "A" for GaSb, InP Tag: Visual edit
- 14:16, 22 September 2017 diff hist 0 m Dry Etching Recipes moves Si into proper alphabetical row Tag: Visual edit
- 14:14, 22 September 2017 diff hist +71 Dry Etching Recipes Added Ta2O5 etching, described in paper by Blumenthal Group. Tag: Visual edit
- 14:05, 22 September 2017 diff hist +26 m Dry Etching Recipes removed spurious column |- text, alphabetizing.
- 13:59, 22 September 2017 diff hist 0 m Dry Etching Recipes alphabetized mostly Tag: Visual edit
- 13:52, 22 September 2017 diff hist -2 m Dry Etching Recipes partially alphabetized and removed one spurious row Tag: Visual edit: Switched
- 13:44, 22 September 2017 diff hist -12 m E-Beam Evaporation Recipes →ITO deposition (E-Beam 2): removed bold titles Tag: Visual edit