User contributions
Jump to navigation
Jump to search
- 13:49, 23 March 2020 diff hist +28 E-Beam 1 (Sharon) Undo revision 157330 by Freeborn d (talk) Tag: Undo
- 13:42, 23 March 2020 diff hist -28 E-Beam 1 (Sharon) →Documentation
- 13:01, 23 March 2020 diff hist +41 N File:EB-1 operation instructions.pdf EB#1 operation instructions current
- 12:30, 23 March 2020 diff hist +41 N File:Ebeam 1 operating instructions.pdf New operating instructions. current
- 19:19, 20 March 2020 diff hist -8 Don Freeborn Changed e-mail and ph number. Tag: Visual edit
- 19:15, 20 March 2020 diff hist +28 PECVD 1 (PlasmaTherm 790) Changed tool supervisor. Tag: Visual edit
- 18:56, 20 March 2020 diff hist +1 Thermal Evap 1 Changed tool supervisor. Tag: Visual edit
- 18:53, 20 March 2020 diff hist +32 E-Beam 1 (Sharon) Changed tool supervisor. Tag: Visual edit
- 18:51, 20 March 2020 diff hist +32 E-Beam 4 (CHA) Changed tool supervisor. Tag: Visual edit
- 10:23, 19 July 2019 diff hist 0 N File:Running a process on Plasma Therm SLR.pdf current
- 16:26, 13 June 2019 diff hist -29 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) →Documentation Tag: Visual edit
- 15:26, 25 February 2019 diff hist -209 Don Freeborn Added links. Tag: Visual edit
- 15:19, 25 February 2019 diff hist -900 Don Freeborn Linked the Fluorine etch page. Tag: Visual edit
- 15:08, 25 February 2019 diff hist -108 Don Freeborn Changed list. Tag: Visual edit
- 13:00, 29 January 2019 diff hist +15 m Wafer Bonder (Logitech WBS7) →Operation Procedures Tag: Visual edit
- 08:51, 29 January 2019 diff hist +45 m Wafer Bonder (SUSS SB6-8E) →Detailed Specifications Tag: Visual edit
- 15:24, 7 November 2018 diff hist -15 m E-Beam 3 (Temescal) →About: Removed the word rotated. Tag: Visual edit
- 16:20, 10 September 2018 diff hist -360 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) Removed reference to the Bosch process. Tag: Visual edit
- 16:15, 10 September 2018 diff hist +11 Fluorine ICP Etcher (PlasmaTherm/SLR Fluorine ICP) Added gases. Tag: Visual edit
- 08:53, 13 March 2014 diff hist -1 E-BEAM current