Resistivity Mapper (CDE RESMAP)

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Resistivity Mapper (CDE RESMAP)
CDEResmap.jpg
Tool Type Inspection, Test and Characterization
Location Bay ?
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description CDE Resmap 4 Point Resistivity Mapper
Manufacturer Creative Design Engineering


About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers. The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.