Rapid Thermal Processor (SSI Solaris 150)

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Work In Progress

This article is still under construction. It may contain factual errors. Content is subject to change.


Rapid Thermal Processor (SSI Solaris 150)
RTP-Solaris-150.jpg
Tool Type Thermal Processing
Location Bay 5
Supervisor Brian Lingg
Supervisor Phone (805) 893-8145
Supervisor E-Mail lingg_b@ucsb.edu
Description Rapid Thermal Annealing (RTA)
Manufacturer SSI
Model Solaris 150
Thermal Processing Recipes
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About

The Solaris 150 is a manual loading RTP system for R&D and pre-production. The Solaris 150 can process up to 152.4mm substrates at a temperature range from RT- 1250 degrees. The unique temperature measurement system of the Solaris requires virtually no calibration for different wafer types and backside emmissivity differences.

The Solaris uses a unique PID process controller that ensures accurate temperature stability and uniformity. The system can accommodate four interlocked MFCs for gas mixing and forming gas processing. The Solaris is designed for silicon implant annealing and monitoring and compound semiconductor implant activation and ohmic alloying.

Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions