Rapid Thermal Processor (SSI Solaris 150)

Work In Progress This article is still under construction. It may contain factual errors. Content is subject to change.

Rapid Thermal Processor (SSI Solaris 150) Tool Type Thermal processing Location Bay 5 Supervisor Brian Lingg Supervisor Phone (805) 893-8145 Supervisor E-Mail lingg_b@ucsb.edu Description Rapid Thermal Annealing (RTA) Manufacturer SSI Model Solaris 150 Thermal processing Recipes Sign up for this tool

About

To Do: insert basic info

Detailed Specificiations

To Do: list of specs, wafer sizes etc.

Operating Instructions

• Solaris 150 Operating Procedure