Difference between revisions of "RIE Etching Recipes"
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(Created page with "{{recipes}} =RIE 1 (Custom) = =RIE 2 (MRC) = =RIE 3 (MRC) = =RIE 5 (PlasmaTherm) = =Si Deep RIE (PlasmaTherm/Bosch Etch)=") |
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| − | {{recipes}} | + | {{recipes|Dry Etching}} |
=[[RIE 1 (Custom)]] = | =[[RIE 1 (Custom)]] = | ||
=[[RIE 2 (MRC)]] = | =[[RIE 2 (MRC)]] = | ||