Packaging Recipes
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Dicing Saw Recipes (ADT 7100)
Cutting Parameters
| Material | Blade Type | Spindle Speed | Cut Speed |
|---|---|---|---|
| Blade Diam | Flange Diam. | Blade Exposure |
|---|---|---|
Mounting/Unmounting Samples
The UV-Release Tape dispenser is most-often used for mounting sample for dicing.
The Tape Model installed is XYZXYZ. Data Sheet Here.
- Procedure for mounting sample on UV-Release Tape
- Full Release: 60 sec exposure
- Partial Release for Shipping: 9 sec exposure
Surface Protection
Users most often use sacrificial photoresists to protect the surface from accumulating dicing dust. The static-buildup of dielectric films causes the dust to adhere strongly. Ensure that the PR thickness will adequately coat all your exposed topography (eg. use a ≥2µm thick PR for protecting 1.5-2.0µm tall etched features).
- Choose a photoresist of appropriate thickness, and spin-coat it & soft-bake it according to a standard recipe. Contact Alignment PR Recipes Stepper PR Recipes
- Perform your dicing
- Strip the PR in Acetone and ISO & N2 dry