Difference between revisions of "PECVD Recipes"
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{{recipes}} |
{{recipes}} |
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| + | =[[PECVD 1 (PlasmaTherm 790)]]= |
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| + | =[[PECVD 2 (Advanced Vacuum)]]= |
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| + | =[[ICP-PECVD (Unaxis VLR)]]= |
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Revision as of 10:09, 18 July 2012
Back to [[{{{1}}} Recipes]].