Difference between revisions of "Oven 4 (Thermo-Fisher HeraTherm)"

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(added toolid for SUM)
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|type = Lithography
|type = Lithography
|super= Brian Lingg
|super= Michael Barreraz
|super2= Aidan Hopkins
|location=Bay 6
|location=Bay 6
|description = Programmable Oven
|description = Programmable Oven

Revision as of 09:19, 30 August 2022

Oven 4 (Thermo-Fisher HeraTherm)
Tool Type Lithography
Location Bay 6
Description Programmable Oven
Manufacturer Thermo Scientific
Model HeraTherm
Sign up for this tool


This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.


  • Maximum Temperature = 330 C (no active cooling)
  • Gases: N2, manually set with needle valve (not programmable)
  • Multi-step programmable temperature ramps
  • Programmable atmospheric purge (for cooling)


To Do: User Manual