Difference between revisions of "Oven 4 (Thermo-Fisher HeraTherm)"

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|picture=Oven4.jpg
 
|picture=Oven4.jpg
 
|type = Lithography
 
|type = Lithography
|super= Brian Lingg
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|super= Michael Barreraz
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|super2= Aidan Hopkins
 
|location=Bay 6
 
|location=Bay 6
 
|description = Programmable Oven
 
|description = Programmable Oven

Revision as of 09:19, 30 August 2022

Oven 4 (Thermo-Fisher HeraTherm)
Oven4.jpg
Tool Type Lithography
Location Bay 6
Description Programmable Oven
Manufacturer Thermo Scientific
Model HeraTherm
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About

This oven is often used for long thermal cures and wafer bonding. It has programmable temperature ramps and hold times, but the ramp rate is only "low/med./high" (not an exact ramp rate). A manual needle valve for nitrogen purge has been installed on the back of the oven.

Specifications

  • Maximum Temperature = 330 C (no active cooling)
  • Gases: N2, manually set with needle valve (not programmable)
  • Multi-step programmable temperature ramps
  • Programmable atmospheric purge (for cooling)

Documentation

To Do: User Manual