Difference between revisions of "Lithography Recipes"
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*{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} | *{{fl|SPR950-Positive-Resist-Datasheet.pdf|SPR950-0.8}} | ||
*{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} | *{{fl|SPR955-Positive-Resist-Datasheet.pdf|SPR955CM (SPR955CM-0.9, SPR955CM-1.8)}} | ||
− | *{{fl|UV6-Positive-Resist-Datasheet.pdf|UV6-0.7}} | + | *{{fl|UV6-Positive-Resist-Datasheet.pdf|UV6-0.7}} |
+ | *{{fl|UV210-Positive-Resist-Datasheet.pdf|UV210-0.3}} | ||
;Negative Photoresists | ;Negative Photoresists | ||
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;Anti-Reflection Coatings | ;Anti-Reflection Coatings | ||
− | *{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}} | + | *{{fl|XHRiC-Anti-Reflective-Coating.pdf|XHRiC}} |
+ | *{{fl|AR2-Anti-Reflective-Coating.pdf|AR2}} | ||
+ | *{{fl|DS-K101-Anti-Reflective-Coating.pdf|DS-K101 (developable BARC)}} | ||
;Developers | ;Developers |
Revision as of 14:24, 22 April 2013
Lift-Off Techniques
Chemical Datasheets
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Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.