Difference between revisions of "Lithography Recipes"
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*{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020}} | *{{fl|AZnLOF2020-Negative-Resist-Datasheet.pdf|AZnLOF2020}} | ||
;Underlayers | ;Underlayers | ||
| − | *{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15}} | + | *{{fl|PMGI-Underlayer-Datasheet.pdf|PMGI (PMGI SF-11, PMGI SF-13, PMGI SF-15)}} |
*{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}} | *{{fl|LOL2000-Underlayer-Datasheet.pdf|Shipley LOL2000}} | ||
| + | ;E-beam resists | ||
| + | *{{fl|PMMA-E-Beam-Resist-Datasheet.pdf|PMMA (PMMA, P(MMA-MAA) copolymer)}} | ||
| + | *{{fl|maN2403-E-Beam-Resist-Datasheet.pdf|maN 2403}} | ||
==Recipes== | ==Recipes== | ||
Revision as of 17:03, 8 November 2012
Lift-Off Techniques
Chemical Datasheets
| To Do: Ask Brian where these should go... |
- Positive Photoresists
- AZP4000 (AZ4110, AZ4210, AZ4330)
- OCG825
- SPR220 (SPR220-2, SPR220-7)
- SPR950-0.8
- SPR955CM (SPR955CM-0.9, SPR955CM-1.8)
- Negative Photoresists
- Underlayers
- E-beam resists
Recipes
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.