Difference between revisions of "ICP Etching Recipes"

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=[[ICP-Etch (Unaxis VLR)]]=
 
=[[ICP-Etch (Unaxis VLR)]]=
===GaAs Etch ===
+
===GaAs-AlGaAs Etch ===
 
*[[media:15-GaAs_etch-Unaxis_ICP_etcher.pdf|GaAs Etch Recipe (30C)]]
 
*[[media:15-GaAs_etch-Unaxis_ICP_etcher.pdf|GaAs Etch Recipe (30C)]]
===AlGaAs Etch ===
 
 
*[[media:14-AlAs-GR-cal_etch-Unaxis_ICP_etcher.pdf|AlGaAs Etch Recipe (30C)]]
 
*[[media:14-AlAs-GR-cal_etch-Unaxis_ICP_etcher.pdf|AlGaAs Etch Recipe (30C)]]
==InP Etch (Unaxis VLR)==
 
===InP Etch ===
 
*[[media:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf|InP Etch Recipe (200C)]]
 
*[[media:18-InP-based_etching-Cl2N2Ar.pdf|InP-based Material Etch Profile (200C)]]
 
  
===InP Etch (H<sub>2</sub> Ar)===
+
==InP-InGaAs-InAlAs Etch (Unaxis VLR)==
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|Unaxis InP Etch Recipe (H<sub>2</sub> Ar 200C) Parameters]]
+
*[[media:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf|InP Etch Recipe (Cl<sub>2</sub>N<sub>2</sub>Ar 200C)]]
*[[media:17-InP%26InGaAs_etch-Cl2H2Ar-Unaxis-VLR.pdf|InP-InGaAs Etch Profile (H<sub>2</sub> Ar 200C)]]
+
*[[media:18-InP-based_etching-Cl2N2Ar.pdf|InP-based Material Etch Profile (Cl<sub>2</sub>N<sub>2</sub>Ar200C)]]
 +
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|Unaxis InP Etch Recipe (Cl<sub>2</sub>H<sub>2</sub> Ar 200C) Parameters]]
 +
*[[media:17-InP%26InGaAs_etch-Cl2H2Ar-Unaxis-VLR.pdf|InP-InGaAs Etch Profile (Cl<sub>2</sub>H<sub>2</sub> Ar 200C)]]
  
 
==GaN Etch (Unaxis VLR)==
 
==GaN Etch (Unaxis VLR)==
 
*[[media:09-Plasma_Etching_of_GaN-UnaxisPM1.pdf|GaN Etch Recipe (85C)]]
 
*[[media:09-Plasma_Etching_of_GaN-UnaxisPM1.pdf|GaN Etch Recipe (85C)]]

Revision as of 08:22, 23 October 2013

Back to Dry Etching Recipes.

Si Deep RIE (PlasmaTherm/Bosch Etch)

Single-step Si Etching (not Bosch Process!) (Si Deep RIE)

ICP Etch 1 (Panasonic E626I)

SiO2 Etching (Panasonic 1)

SiNx Etching (Panasonic 1)

Al Etch (Panasonic 1)

Cr Etch (Panasonic 1)

Ti Etch (Panasonic 1)

AlGaAs Etch (Panasonic 1)

GaN Etch (Panasonic 1)

ICP Etch 2 (Panasonic E640)

SiO2 Etching (Panasonic 2)

SiNx Etching (Panasonic 2)

Al Etch (Panasonic 2)

GaAs Etch (Panasonic 2)

ICP-Etch (Unaxis VLR)

GaAs-AlGaAs Etch

InP-InGaAs-InAlAs Etch (Unaxis VLR)

GaN Etch (Unaxis VLR)