Difference between revisions of "ICP Etching Recipes"

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*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]]
 
*[[media:Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf|SiO<sub>2</sub> CHF3 Etch Variations]]
  
==SiO<sub>2</sub> Pure CHF3 Etch Recipe Variations (Panasonic 1)==
 
*[[media:==SiO<sub>2</sub> Vertical Etch (Panasonic 1)|SiO<sub>2</sub> Vertical Etch Recipe]]
 
  
 
==Cr Etch (Panasonic 1)==
 
==Cr Etch (Panasonic 1)==

Revision as of 10:47, 30 August 2013