Difference between revisions of "ICP Etching Recipes"

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{{recipes|Dry Etching}}
 
{{recipes|Dry Etching}}
 
=[[ICP Etch 1 (Panasonic E626I)]]=
 
=[[ICP Etch 1 (Panasonic E626I)]]=
==SiO Vertical Etch==
+
==SiO<sub>2</sub> Vertical Etch==
*[[media:Panasonic1-SiO-Etch.pdf|SiO Vertical Etch Recipe]]
+
*[[media:Panasonic1-SiO-Etch.pdf|SiO<sub>2</sub> Vertical Etch Recipe]]
  
 
=[[ICP Etch 2 (Panasonic E640)]]=
 
=[[ICP Etch 2 (Panasonic E640)]]=

Revision as of 12:15, 20 August 2012