Difference between revisions of "ICP Etching Recipes"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 9: Line 9:
  
 
=[[ICP-Etch (Unaxis VLR)]]=
 
=[[ICP-Etch (Unaxis VLR)]]=
 +
==InP Etch (Unaxis VLR)==
 +
===InP Etch ===
 +
*[[media:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf|InP Etch Recipe (200C)]]
 +
===InP Etch (H<sub>2</sub> Ar)===
 +
*[[media:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf|InP Etch Recipe (H<sub>2</sub> Ar 200C)]]

Revision as of 12:12, 20 August 2012