High Temp Oven (Blue M)

From UCSB Nanofab Wiki
Revision as of 09:55, 4 June 2019 by John d (talk | contribs) (tool id included for SUM link)
Jump to navigation Jump to search
High Temp Oven (Blue M)
Tool Type Lithography
Location Bay 5
Supervisor Mike Silva
Supervisor Phone (805) 893-3096
Supervisor E-Mail silva@ece.ucsb.edu
Description High Temperature Oven
Manufacturer Blue M Electric
Sign up for this tool

The Blue M oven has a Nitrogen purge (manual flow) and is able to be programmed for a series of custom temperature ramps and holds, with a maximum temperature of 350°C. It is not actively cooled.

Numerous spin-on dielectrics and polymers are often cured in this oven, such as BCB, SU-8 and Polyimide.