File:PECVD1 SiN Stress vs. N2 plot.jpg
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Example of Si3N4 modified stress via. varying N2 flow. Refractive index is relatively constant (one outlier), and stress varies continuously from tensile to compressive. Demis D. John 2011, Blumenthal Group.
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current | 12:08, 2 June 2023 | 843 × 576 (85 KB) | John d (talk | contribs) | better formatting, colors axes mathcing markers etc | |
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