Difference between revisions of "File:PECVD1 SiN Stress vs. N2 plot.jpg"

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Latest revision as of 12:08, 2 June 2023

Example of Si3N4 modified stress via. varying N2 flow. Refractive index is relatively constant (one outlier), and stress varies continuously from tensile to compressive. Demis D. John 2011, Blumenthal Group.

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current12:08, 2 June 2023Thumbnail for version as of 12:08, 2 June 2023843 × 576 (85 KB)John d (talk | contribs)better formatting, colors axes mathcing markers etc
11:52, 2 June 2023Thumbnail for version as of 11:52, 2 June 2023842 × 572 (73 KB)John d (talk | contribs)

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