Difference between revisions of "E-Beam Evaporation Recipes"

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{{recipes|Vacuum Deposition}}
  
{{recipes|Vacuum Deposition}}
 
=[[E-Beam 1 (Sharon)]]=
  
=[[E-Beam 1 (Sharon)]]=
  +
==Materials Table==
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{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible wikitable"
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|-
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! colspan=8 width=1100 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
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|- bgcolor="#D0E7FF"
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! width="75" bgcolor="#D0E7FF" align="center" | '''Material'''
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! width="75" bgcolor="#D0E7FF" align="center" | '''Position'''
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! width="75" bgcolor="#D0E7FF" align="center" | '''Hearth / Crucible'''
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! width="85" bgcolor="#D0E7FF" align="center" | '''Film Number'''
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! width="75" bgcolor="#D0E7FF" align="center" | '''Density'''
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! width="75" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
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! width="75" bgcolor="#D0E7FF" align="center" | '''Tooling'''
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! width="500" bgcolor="#D0E7FF" align="center" | '''Comments'''
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|-
  +
| Ag
  +
| 4
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| C
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| 5
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| 10.5
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| 0.524
  +
| 140
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| Brian, could you please check this table? Z ratio should be 0.529
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|-
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| Al
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| 2
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| C
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| 6
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| 2.7
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| 1.080
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| 118
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|
  +
|-
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| Al<sub>2</sub>O<sub>3</sub>
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| 1
  +
| C
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| 6
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| 3.97
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| 0.50
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| 169
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| Z-ratio should be 0.336
  +
|-
  +
| Au
  +
| 4
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| C
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| 4
  +
| 19.3
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| 0.381
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| 138
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| Bazookas can be used at 20-30Å/sec.
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|-
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| AuGe
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| 3
  +
| C
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| 5
  +
| 17.63
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| 0.397
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| 151
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| Composition unpredictable unless you practically empty the crucible.
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|-
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| Cr
  +
| 3
  +
| H
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| 6
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| 7.2
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| 0.305
  +
| 140
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| Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
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|-
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| Fe
  +
|
  +
|
  +
|
  +
| 7.86
  +
| 0.349
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|
  +
|
  +
|-
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| Ge
  +
| 3
  +
| C
  +
| 6
  +
| 5.35
  +
| 0.516
  +
| 130
  +
|
  +
|-
  +
| MgO
  +
| 1
  +
|
  +
| 6
  +
| 3.58
  +
| 0.411
  +
|
  +
|
  +
|-
  +
| Mo
  +
|
  +
|
  +
|
  +
| 10.2
  +
| 0.257
  +
|
  +
|
  +
|-
  +
| Ni
  +
| 1
  +
| H
  +
| 1
  +
| 8.91
  +
| 0.331
  +
| 140
  +
| Prone to spitting. Cool down for 15 minutes before venting.
  +
|-
  +
| NiCr
  +
| 1
  +
| H
  +
| 6
  +
| 8.23
  +
| 0.321
  +
|
  +
| Density 8.52, z ratio 0.3258
  +
|-
  +
| Nb
  +
| 4
  +
| C
  +
| 6
  +
| 8.57
  +
| 0.516 ( should be 0.492)
  +
|
  +
| Cool down for at least 35 minutes before venting.
  +
|-
  +
| Pd
  +
| 1
  +
| H
  +
| 9
  +
| 12.0
  +
| 0.357
  +
| 140
  +
|
  +
|-
  +
| Pt
  +
| 1
  +
| C
  +
| 8
  +
| 21.40
  +
| 0.245
  +
| 140
  +
| Prone to spitting. Evaporate at 1.5Å/sec or less.
  +
|-
  +
| Si
  +
| 2
  +
| H
  +
| 2
  +
| 2.32
  +
| 0.712
  +
| 150
  +
| Cool down very slowly after evaporating lest you crack the source.
  +
|-
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| SiO
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|
  +
| C
  +
| 6
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| 2.13
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| 0.87
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| 132
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|
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|-
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| SiO<sub>2</sub>
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| 1
  +
| C
  +
| 6
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| 2.2 ( should be 2.648)
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| 1.07 ( should be 1.000)
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| 140
  +
| Please change the crystal and the upper mirror after evaporating oxide.
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|-
  +
| SrF<sub>2</sub>
  +
| 1
  +
| C
  +
| 6
  +
| 4.28
  +
| 0.727
  +
| 140
  +
|
  +
|-
  +
| Ta
  +
| 1
  +
| H
  +
| 6
  +
| 16.6
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| 0.262
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|
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| Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
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|-
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| W
  +
| 1
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| C
  +
| 6
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| 19.3
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| 0.163
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| 138
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|
  +
|-
  +
| Ti
  +
| 3
  +
| H
  +
| 3
  +
| 4.50
  +
| 0.628
  +
| 139
  +
|
  +
|}
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=[[E-Beam 2 (Custom)]]=
  
=[[E-Beam 2 (Custom)]]=
 
=[[E-Beam 3 (Temescal)]]=
  
=[[E-Beam 3 (Temescal)]]=

Revision as of 10:58, 7 September 2012

Back to Vacuum Deposition Recipes.

E-Beam 1 (Sharon)

Materials Table

Materials Table
Material Position Hearth / Crucible Film Number Density Z Ratio Tooling Comments
Ag 4 C 5 10.5 0.524 140 Brian, could you please check this table? Z ratio should be 0.529
Al 2 C 6 2.7 1.080 118
Al2O3 1 C 6 3.97 0.50 169 Z-ratio should be 0.336
Au 4 C 4 19.3 0.381 138 Bazookas can be used at 20-30Å/sec.
AuGe 3 C 5 17.63 0.397 151 Composition unpredictable unless you practically empty the crucible.
Cr 3 H 6 7.2 0.305 140 Do not evaporate more than 200Å of Cr in the E-Beam evaporator.
Fe 7.86 0.349
Ge 3 C 6 5.35 0.516 130
MgO 1 6 3.58 0.411
Mo 10.2 0.257
Ni 1 H 1 8.91 0.331 140 Prone to spitting. Cool down for 15 minutes before venting.
NiCr 1 H 6 8.23 0.321 Density 8.52, z ratio 0.3258
Nb 4 C 6 8.57 0.516 ( should be 0.492) Cool down for at least 35 minutes before venting.
Pd 1 H 9 12.0 0.357 140
Pt 1 C 8 21.40 0.245 140 Prone to spitting. Evaporate at 1.5Å/sec or less.
Si 2 H 2 2.32 0.712 150 Cool down very slowly after evaporating lest you crack the source.
SiO C 6 2.13 0.87 132
SiO2 1 C 6 2.2 ( should be 2.648) 1.07 ( should be 1.000) 140 Please change the crystal and the upper mirror after evaporating oxide.
SrF2 1 C 6 4.28 0.727 140
Ta 1 H 6 16.6 0.262 Requires extremely high current. Minimum 35 minute cool down. Hearth #3 may be used. Call me before you try Ta.
W 1 C 6 19.3 0.163 138
Ti 3 H 3 4.50 0.628 139

E-Beam 2 (Custom)

E-Beam 3 (Temescal)

E-Beam 4 (CHA)

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