Difference between revisions of "Dry Etching Recipes"
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{| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" | {| class="wikitable" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" border="1" | ||
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− | ! colspan=" | + | ! colspan="17" width="725" height="45" |<div style="font-size: 150%;">Dry Etching Recipes</div> |
|- bgcolor="#d0e7ff" | |- bgcolor="#d0e7ff" | ||
|<!-- INTENTIONALLY LEFT BLANK --> | |<!-- INTENTIONALLY LEFT BLANK --> | ||
− | ! colspan=" | + | ! colspan="3" |'''[[RIE Etching Recipes|RIE Etching]]''' |
! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]''' | ! colspan="5" |'''[[ICP Etching Recipes|ICP Etching]]''' | ||
! colspan="5" align="center" bgcolor="#d0e7ff" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]''' | ! colspan="5" align="center" bgcolor="#d0e7ff" |'''[[Oxygen Plasma System Recipes|Oxygen Plasma Systems]]''' | ||
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! width="65" align="center" bgcolor="#d0e7ff" |'''Material''' | ! width="65" align="center" bgcolor="#d0e7ff" |'''Material''' | ||
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| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]] | | width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]] | ||
| width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]] | | width="65" bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]] | ||
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! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3</sub> | ! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3</sub> | ||
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|- bgcolor="#eeffff" | |- bgcolor="#eeffff" | ||
! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3 (Sapphire)</sub> | ! align="center" bgcolor="#d0e7ff" |Al<sub>2</sub>O<sub>3 (Sapphire)</sub> | ||
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! align="center" bgcolor="#d0e7ff" |AlGaAs | ! align="center" bgcolor="#d0e7ff" |AlGaAs | ||
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! align="center" bgcolor="#d0e7ff" |AlGaN | ! align="center" bgcolor="#d0e7ff" |AlGaN | ||
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! align="center" bgcolor="#d0e7ff" |CdZnTe | ! align="center" bgcolor="#d0e7ff" |CdZnTe | ||
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|{{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}} | |{{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}} | ||
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! align="center" bgcolor="#d0e7ff" |GaAs | ! align="center" bgcolor="#d0e7ff" |GaAs | ||
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! align="center" bgcolor="#d0e7ff" |GaN | ! align="center" bgcolor="#d0e7ff" |GaN | ||
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! align="center" bgcolor="#d0e7ff" |HfO<sub>2</sub> | ! align="center" bgcolor="#d0e7ff" |HfO<sub>2</sub> | ||
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! align="center" bgcolor="#d0e7ff" |InGaAlAs | ! align="center" bgcolor="#d0e7ff" |InGaAlAs | ||
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|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}} | |{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}} | ||
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! align="center" bgcolor="#d0e7ff" |InGaAsP | ! align="center" bgcolor="#d0e7ff" |InGaAsP | ||
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|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}} | |{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}} | ||
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! align="center" bgcolor="#d0e7ff" |InP | ! align="center" bgcolor="#d0e7ff" |InP | ||
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|{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}} | |{{rl|RIE Etching Recipes|RIE 2 (MRC)|InP-InGaAsP-InGaAlAs Etching (RIE 2)|InP Etch (RIE 2)}} | ||
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! align="center" bgcolor="#d0e7ff" |ITO | ! align="center" bgcolor="#d0e7ff" |ITO | ||
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|{{rl|RIE Etching Recipes|ITO Etch (RIE 2)}} | |{{rl|RIE Etching Recipes|ITO Etch (RIE 2)}} | ||
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!Photoresist | !Photoresist | ||
& ARC | & ARC | ||
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|A | |A | ||
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! align="center" bgcolor="#d0e7ff" |SiC | ! align="center" bgcolor="#d0e7ff" |SiC | ||
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! align="center" bgcolor="#d0e7ff" |SiN | ! align="center" bgcolor="#d0e7ff" |SiN | ||
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}} | |{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}} | ||
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! align="center" bgcolor="#d0e7ff" |SiO<sub>2</sub> | ! align="center" bgcolor="#d0e7ff" |SiO<sub>2</sub> | ||
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}} | |{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}} | ||
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! align="center" bgcolor="#d0e7ff" |Ta<sub>2</sub>O<sub>5</sub> | ! align="center" bgcolor="#d0e7ff" |Ta<sub>2</sub>O<sub>5</sub> | ||
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! align="center" bgcolor="#d0e7ff" |TiO<sub>2</sub> | ! align="center" bgcolor="#d0e7ff" |TiO<sub>2</sub> | ||
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! align="center" bgcolor="#d0e7ff" |W-TiW | ! align="center" bgcolor="#d0e7ff" |W-TiW | ||
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|- bgcolor="#eeffff" | |- bgcolor="#eeffff" | ||
! align="center" bgcolor="#d0e7ff" |ZnO<sub>2</sub> | ! align="center" bgcolor="#d0e7ff" |ZnO<sub>2</sub> | ||
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! align="center" bgcolor="#d0e7ff" |ZnS | ! align="center" bgcolor="#d0e7ff" |ZnS | ||
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|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}} | |{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}} | ||
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! align="center" bgcolor="#d0e7ff" |ZnSe | ! align="center" bgcolor="#d0e7ff" |ZnSe | ||
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|{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}} | |{{rl|RIE Etching Recipes|ZnS Etching (RIE 2)}} | ||
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! align="center" bgcolor="#d0e7ff" |ZrO<sub>2</sub> | ! align="center" bgcolor="#d0e7ff" |ZrO<sub>2</sub> | ||
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! align="center" bgcolor="#d0e7ff" |'''Material''' | ! align="center" bgcolor="#d0e7ff" |'''Material''' | ||
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| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]] | | bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_2_.28MRC.29|RIE 2<br> (MRC)]] | ||
| bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]] | | bgcolor="#daf1ff" |[[RIE_Etching_Recipes#RIE_3_.28MRC.29|RIE 3<br> (MRC)]] |
Revision as of 21:27, 16 September 2019
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.