Difference between revisions of "Dry Etching Recipes"

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| {{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}}
 
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| {{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}}
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| {{rl|ICP Etching Recipes|ICP-Etch (Unaxis VLR)|GaSb Etch Unaxis VLR)}}
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! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
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! bgcolor="#D0E7FF" align="center" | Si
 
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| {{rl|RIE Etching Recipes|RIE 3 (MRC)|SiO<sub>2</sub> Etching (RIE 3)}}
 
 
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| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|Si Etch (PlasmaTherm/Bosch Etch)}}
| {{rl|ICP Etching Recipes|SIO2Etch(Panasonic 2)}}
 
 
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| {{rl|Other Dry Etching Recipes|Other Dry Etch (Vapor HF Etcher)}}
 
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! bgcolor="#D0E7FF" align="center" | SiN
 
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|{{rl|RIE Etching Recipes|RIE 3 (MRC)|SiN<sub>x</sub> Etching (RIE 3)}}
 
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| {{rl|ICP Etching Recipes|SINxEtch(Panasonic 1)}}
 
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| {{rl|Other Dry Etching Recipes|Other Dry Etch (XeF2 Etcher)}}
 
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! bgcolor="#D0E7FF" align="center" | SiOxNy
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! bgcolor="#D0E7FF" align="center" | Sapphire (Al<sub>2</sub>O<sub>3</sub>)
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| {{rl|ICP Etching Recipes|W-TiW Etch(Panasonic 1)}}
 
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| {{rl|RIE Etching Recipes|CdZnTe Etch (RIE 2)}}
 
 
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| {{rl|ICP Etching Recipes|W-TiW Etch(Panasonic 1)}}
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| {{rl|ICP Etching Recipes|Si Etch (PlasmaTherm/Bosch Etch)}}
 
 
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! bgcolor="#D0E7FF" align="center" | Sapphire
 
 
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| {{rl|ICP Etching Recipes|Sapphire Etch(Panasonic 1)}}
 
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Revision as of 14:05, 22 September 2017