Difference between revisions of "Dry Etch"

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(Created page with "Currently the Nanofab has the following '''{{PAGENAME}}''' tools. Please click on the tool for more information. * RIE 1 * RIE 2 * RIE 3 * RIE 5 * [[Si Deep RIE]…")
(No difference)

Revision as of 07:24, 27 June 2012

Currently the Nanofab has the following Dry Etch tools. Please click on the tool for more information.

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Dry_Etch&oldid=10"