Difference between revisions of "ASML Stepper 3 - UCSB Test Reticles"
m (typo) |
(added contact_mark) |
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| Line 22: | Line 22: | ||
has 1.1mm margin on all sides |
has 1.1mm margin on all sides |
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| − | |[[File:Stepper align - Screen Shot 2018-07-23 at 11.24.31 AM.png|frameless|213x213px]] |
+ | |White is Chrome, Pattern is Clear[[File:Stepper align - Screen Shot 2018-07-23 at 11.24.31 AM.png|frameless|213x213px]] |
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|- |
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|Multi-Purpose Alignment Mark - Positive |
|Multi-Purpose Alignment Mark - Positive |
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| Line 33: | Line 33: | ||
>> Use this for Dicing Alginment Guides |
>> Use this for Dicing Alginment Guides |
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| + | |White is Chrome, Pattern is Clear |
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| − | + | [[File:GlobalMulti POS - Screen Shot 2018-07-23 at 11.17.23 AM.png|frameless|145x145px]] |
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|- |
|- |
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| − | |Multi-Purpose Alignment Mark - |
+ | |Multi-Purpose Alignment Mark - Negative |
|0.710000 , 0.710000 |
|0.710000 , 0.710000 |
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|6.750000 , -9.450000 |
|6.750000 , -9.450000 |
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| Line 41: | Line 42: | ||
Smaller "+" mark is (0.225,-0.225)mm down-right |
Smaller "+" mark is (0.225,-0.225)mm down-right |
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| − | Blank space on left+top sides |
+ | Blank (masked) space on left+top sides |
1.0mm margin on all sides |
1.0mm margin on all sides |
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| + | |Pattern is Clear |
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| − | + | [[File:GlobalMulti NEG - Screen Shot 2018-07-23 at 11.22.19 AM.png|frameless|115x115px]] |
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| + | |- |
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| + | |Contact_Mark |
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| + | |0.564000 , 0.564000 |
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| + | |6.750000 , 9.450000 |
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| + | |ImageShift references the center of the contact alignment mark "+" |
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| + | |||
| + | with 1.1mm margin on all sides |
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| + | |[[File:Align Front - Screen Shot 2018-07-23 at 11.32.16 AM.png|frameless|146x146px]] |
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Revision as of 03:29, 1 August 2018
Reticle ID: "UCSB-OPC1"
Alignment Markers
| Image ID | Image Size
X , Y (Wafer, mm) |
Image Shift
X , Y (Wafer, mm) |
Notes/Description | Schematics |
|---|---|---|---|---|
| GCA_Align | 0.530000 , 0.140000 | -6.750000 , 9.450000 | ImageShift references the center of the -X- "global" mark.
The ==||| "Local" mark is X+200µm to the right has 1.1mm margin on all sides |
White is Chrome, Pattern is Clear
|
| Multi-Purpose Alignment Mark - Positive | 0.900000 , 0.900000 | -6.750000 , -9.450000 | ImageShift is the center coords of the larger "+" mark
Smaller "+" mark is (0.225,-0.225)mm down-right 0.925mm margin on all sides >> Use this for Dicing Alginment Guides |
White is Chrome, Pattern is Clear
|
| Multi-Purpose Alignment Mark - Negative | 0.710000 , 0.710000 | 6.750000 , -9.450000 | ImageShift is the center coords of the larger "+" mark
Smaller "+" mark is (0.225,-0.225)mm down-right Blank (masked) space on left+top sides 1.0mm margin on all sides |
Pattern is Clear
|
| Contact_Mark | 0.564000 , 0.564000 | 6.750000 , 9.450000 | ImageShift references the center of the contact alignment mark "+"
with 1.1mm margin on all sides |
|
Resolution Test Charts
The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.
In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_... patterns are for calibrating the OPC algorithm, and are not for user analysis.
Calibration Chart Layout
Resolution Chart Schematic
"resolution_chart_ORIG" cell in the above.
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:
Coords for "UCSB_Cal" Resolution Test Patterns
Each of the above cells is repeated on the following coordinates:
| Image Size
X , Y (Wafer, mm) |
Image Shift
X (Wafer, mm) |
Image Shift
Y (Wafer, mm) |
|---|---|---|
| 2.610000 , 2.610000 | -9.450000 | 12.150000 |
| same as above | -6.750000 | 12.150000 |
| -4.050000 | 12.150000 | |
| -1.350000 | 12.150000 | |
| 1.350000 | 12.150000 | |
| 4.050000 | 12.150000 | |
| 6.750000 | 12.150000 | |
| 9.450000 | 12.150000 | |
| -9.450000 | 9.450000 | |
| Alignment Marker | – | – |
| -4.050000 | 9.450000 | |
| -1.350000 | 9.450000 | |
| 1.350000 | 9.450000 | |
| 4.050000 | 9.450000 | |
| Alignment Marker | – | – |
| 9.450000 | 9.450000 | |
| -9.450000 | 6.750000 | |
| -6.750000 | 6.750000 | |
| -4.050000 | 6.750000 | |
| -1.350000 | 6.750000 | |
| 1.350000 | 6.750000 | |
| 4.050000 | 6.750000 | |
| 6.750000 | 6.750000 | |
| 9.450000 | 6.750000 | |
| -9.450000 | 4.050000 | |
| -6.750000 | 4.050000 | |
| -4.050000 | 4.050000 | |
| -1.350000 | 4.050000 | |
| 1.350000 | 4.050000 | |
| 4.050000 | 4.050000 | |
| 6.750000 | 4.050000 | |
| 9.450000 | 4.050000 | |
| -9.450000 | 1.350000 | |
| -6.750000 | 1.350000 | |
| -4.050000 | 1.350000 | |
| -1.350000 | 1.350000 | |
| 1.350000 | 1.350000 | |
| 4.050000 | 1.350000 | |
| 6.750000 | 1.350000 | |
| 9.450000 | 1.350000 | |
| -9.450000 | -1.350000 | |
| -6.750000 | -1.350000 | |
| -4.050000 | -1.350000 | |
| -1.350000 | -1.350000 | |
| 1.350000 | -1.350000 | |
| 4.050000 | -1.350000 | |
| 6.750000 | -1.350000 | |
| 9.450000 | -1.350000 | |
| -9.450000 | -4.050000 | |
| -6.750000 | -4.050000 | |
| -4.050000 | -4.050000 | |
| -1.350000 | -4.050000 | |
| 1.350000 | -4.050000 | |
| 4.050000 | -4.050000 | |
| 6.750000 | -4.050000 | |
| 9.450000 | -4.050000 | |
| -9.450000 | -6.750000 | |
| -6.750000 | -6.750000 | |
| -4.050000 | -6.750000 | |
| -1.350000 | -6.750000 | |
| 1.350000 | -6.750000 | |
| 4.050000 | -6.750000 | |
| 6.750000 | -6.750000 | |
| 9.450000 | -6.750000 | |
| -9.450000 | -9.450000 | |
| Alignment Marker | – | – |
| -4.050000 | -9.450000 | |
| -1.350000 | -9.450000 | |
| 1.350000 | -9.450000 | |
| 4.050000 | -9.450000 | |
| Alignment Marker | – | – |
| 9.450000 | -9.450000 | |
| -9.450000 | -12.150000 | |
| -6.750000 | -12.150000 | |
| -4.050000 | -12.150000 | |
| -1.350000 | -12.150000 | |
| 1.350000 | -12.150000 | |
| 4.050000 | -12.150000 | |
| 6.750000 | -12.150000 | |
| 9.450000 | -12.150000 |