Difference between revisions of "ASML Stepper 3 - UCSB Test Reticles"
(→Alignment Markers: rename multipurpose to EBL) |
(→Coords for "UCSB_Cal" Calibration Patterns: added coords for each resolution_chart_ORIG) |
||
Line 69: | Line 69: | ||
==== Resolution Chart Schematic ==== |
==== Resolution Chart Schematic ==== |
||
"resolution_chart_ORIG" cell in the above. |
"resolution_chart_ORIG" cell in the above. |
||
− | [[File:Resolution Chart - Screen Shot 2018-07-23 at 1.36.31 PM.png|alt=Resolution Chart Layout schematic|none|thumb|400x400px|Resolution Chart Layout, with res. test from 2.00µm to 0.130µm]] |
+ | [[File:Resolution Chart - Screen Shot 2018-07-23 at 1.36.31 PM.png|alt=Resolution Chart Layout schematic|none|thumb|400x400px|'''"resolution_chart_ORIG":''' Resolution Chart Layout, with res. test from 2.00µm to 0.130µm]] |
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied: |
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied: |
||
− | [[File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png|alt=OPC'd Resolution Chart Layout schematic|none|thumb|395x395px|OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm]] |
+ | [[File:Resolution chart OPC - Screen Shot 2018-07-23 at 1.40.48 PM.png|alt=OPC'd Resolution Chart Layout schematic|none|thumb|395x395px|'''"resolution_chart_OPC":''' OPC'd Resolution Chart Layout, with res. test from 2.0µm to 0.130µm]] |
+ | |||
+ | ==== Coords for "resolution_chart" Calibration patterns ==== |
||
+ | ''Image coords for each of the "resolution_chart_ORIG" cells. You can pick just one of these for shooting a resolution test structure. The purpose of the many different locations is to check for variations due to lens aberrations. You could just choose one near the center of the plate to test your process, or you could choose a chart that is in a similar location as the pattern you're shooting on your mask plate.'' |
||
+ | |||
+ | ''Note that some portion of the adjacent patterns will likely be exposed as well, due to the patterns not being surrounded by 1mm of chrome. Make sure you set your Cell Size large enough to make sure the bleed-over doesn't overlap with adjacent die.'' |
||
+ | {| class="wikitable" |
||
+ | !Image Size |
||
+ | X , Y |
||
+ | |||
+ | (Wafer, mm) |
||
+ | !Image Shift |
||
+ | X |
||
+ | |||
+ | (Wafer, mm) |
||
+ | !Image Shift |
||
+ | Y |
||
+ | |||
+ | (Wafer, mm) |
||
+ | |- |
||
+ | |0.605 , 1.005 |
||
+ | | -10.115000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |same for each |
||
+ | | -7.415000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |" " |
||
+ | | -4.715000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |" " |
||
+ | | -2.015000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |" " |
||
+ | |0.685000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |" " |
||
+ | |3.385000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |" " |
||
+ | |6.085000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | |" " |
||
+ | |8.785000 |
||
+ | |12.150000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | colspan="2" |''Alignment Marker'' |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | colspan="2" |''Alignment Marker'' |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | |9.450000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | |6.750000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | |4.050000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | |1.350000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | | -1.350000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | | -4.050000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | | -6.750000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | colspan="2" |''Alignment Marker'' |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | | |
||
+ | | colspan="2" |''Alignment Marker'' |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | | -9.450000 |
||
+ | |- |
||
+ | ! |
||
+ | ! |
||
+ | ! |
||
+ | |- |
||
+ | | |
||
+ | | -10.115000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | | -7.415000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | | -4.715000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | | -2.015000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |0.685000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |3.385000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |6.085000 |
||
+ | | -12.150000 |
||
+ | |- |
||
+ | | |
||
+ | |8.785000 |
||
+ | | -12.150000 |
||
+ | |} |
||
==== Coords for "UCSB_Cal" Calibration Patterns ==== |
==== Coords for "UCSB_Cal" Calibration Patterns ==== |
Revision as of 09:34, 3 August 2018
Reticle ID: "UCSB-OPC1"
This reticle is always installed in the system, in the "System Reticles" Box #1.
Alignment Markers
Resolution Test Charts
The Resolution test charts are repeated all across the reticle, in order to test for lens aberrations. You can have the system window-off only a single resolution chart, but since they are placed closely together on the reticle, it's very likely that partial shots of adjacent charts will also be exposed.
In addition, the repeating cells allow us to test for the proper optical proximity correction algorithm. The Five Dense_...
patterns are for calibrating the OPC algorithm, and are not for user analysis.
Calibration Chart Layout
Cell name is "UCSB_Cal", with coordinates below pointing to center of this cell.
Resolution Chart Schematic
"resolution_chart_ORIG" cell in the above.
The ""resolution_chart_OPC" version has an optical proximity correction algorithm applied:
Coords for "resolution_chart" Calibration patterns
Image coords for each of the "resolution_chart_ORIG" cells. You can pick just one of these for shooting a resolution test structure. The purpose of the many different locations is to check for variations due to lens aberrations. You could just choose one near the center of the plate to test your process, or you could choose a chart that is in a similar location as the pattern you're shooting on your mask plate.
Note that some portion of the adjacent patterns will likely be exposed as well, due to the patterns not being surrounded by 1mm of chrome. Make sure you set your Cell Size large enough to make sure the bleed-over doesn't overlap with adjacent die.
Image Size
X , Y (Wafer, mm) |
Image Shift
X (Wafer, mm) |
Image Shift
Y (Wafer, mm) |
---|---|---|
0.605 , 1.005 | -10.115000 | 12.150000 |
same for each | -7.415000 | 12.150000 |
" " | -4.715000 | 12.150000 |
" " | -2.015000 | 12.150000 |
" " | 0.685000 | 12.150000 |
" " | 3.385000 | 12.150000 |
" " | 6.085000 | 12.150000 |
" " | 8.785000 | 12.150000 |
-10.115000 | 9.450000 | |
Alignment Marker | ||
-4.715000 | 9.450000 | |
-2.015000 | 9.450000 | |
0.685000 | 9.450000 | |
3.385000 | 9.450000 | |
Alignment Marker | ||
8.785000 | 9.450000 | |
-10.115000 | 6.750000 | |
-7.415000 | 6.750000 | |
-4.715000 | 6.750000 | |
-2.015000 | 6.750000 | |
0.685000 | 6.750000 | |
3.385000 | 6.750000 | |
6.085000 | 6.750000 | |
8.785000 | 6.750000 | |
-10.115000 | 4.050000 | |
-7.415000 | 4.050000 | |
-4.715000 | 4.050000 | |
-2.015000 | 4.050000 | |
0.685000 | 4.050000 | |
3.385000 | 4.050000 | |
6.085000 | 4.050000 | |
8.785000 | 4.050000 | |
-10.115000 | 1.350000 | |
-7.415000 | 1.350000 | |
-4.715000 | 1.350000 | |
-2.015000 | 1.350000 | |
0.685000 | 1.350000 | |
3.385000 | 1.350000 | |
6.085000 | 1.350000 | |
8.785000 | 1.350000 | |
-10.115000 | -1.350000 | |
-7.415000 | -1.350000 | |
-4.715000 | -1.350000 | |
-2.015000 | -1.350000 | |
0.685000 | -1.350000 | |
3.385000 | -1.350000 | |
6.085000 | -1.350000 | |
8.785000 | -1.350000 | |
-10.115000 | -4.050000 | |
-7.415000 | -4.050000 | |
-4.715000 | -4.050000 | |
-2.015000 | -4.050000 | |
0.685000 | -4.050000 | |
3.385000 | -4.050000 | |
6.085000 | -4.050000 | |
8.785000 | -4.050000 | |
-10.115000 | -6.750000 | |
-7.415000 | -6.750000 | |
-4.715000 | -6.750000 | |
-2.015000 | -6.750000 | |
0.685000 | -6.750000 | |
3.385000 | -6.750000 | |
6.085000 | -6.750000 | |
8.785000 | -6.750000 | |
-10.115000 | -9.450000 | |
Alignment Marker | ||
-4.715000 | -9.450000 | |
-2.015000 | -9.450000 | |
0.685000 | -9.450000 | |
3.385000 | -9.450000 | |
Alignment Marker | ||
8.785000 | -9.450000 | |
-10.115000 | -12.150000 | |
-7.415000 | -12.150000 | |
-4.715000 | -12.150000 | |
-2.015000 | -12.150000 | |
0.685000 | -12.150000 | |
3.385000 | -12.150000 | |
6.085000 | -12.150000 | |
8.785000 | -12.150000 |
Coords for "UCSB_Cal" Calibration Patterns
Each of the above "UCSB_Cal" cells, including all 7 patterns, is repeated on the following coordinates across the plate (coords are to the center of the "UCSB_Cal" cell):
Image Size
X , Y (Wafer, mm) |
Image Shift
X (Wafer, mm) |
Image Shift
Y (Wafer, mm) |
---|---|---|
2.610000 , 2.610000 | -9.450000 | 12.150000 |
same as above | -6.750000 | 12.150000 |
" " | -4.050000 | 12.150000 |
" " | -1.350000 | 12.150000 |
" " | 1.350000 | 12.150000 |
" " | 4.050000 | 12.150000 |
" " | 6.750000 | 12.150000 |
" " | 9.450000 | 12.150000 |
-9.450000 | 9.450000 | |
Alignment Marker | ||
-4.050000 | 9.450000 | |
-1.350000 | 9.450000 | |
1.350000 | 9.450000 | |
4.050000 | 9.450000 | |
Alignment Marker | ||
9.450000 | 9.450000 | |
-9.450000 | 6.750000 | |
-6.750000 | 6.750000 | |
-4.050000 | 6.750000 | |
-1.350000 | 6.750000 | |
1.350000 | 6.750000 | |
4.050000 | 6.750000 | |
6.750000 | 6.750000 | |
9.450000 | 6.750000 | |
-9.450000 | 4.050000 | |
-6.750000 | 4.050000 | |
-4.050000 | 4.050000 | |
-1.350000 | 4.050000 | |
1.350000 | 4.050000 | |
4.050000 | 4.050000 | |
6.750000 | 4.050000 | |
9.450000 | 4.050000 | |
-9.450000 | 1.350000 | |
-6.750000 | 1.350000 | |
-4.050000 | 1.350000 | |
-1.350000 | 1.350000 | |
1.350000 | 1.350000 | |
4.050000 | 1.350000 | |
6.750000 | 1.350000 | |
9.450000 | 1.350000 | |
-9.450000 | -1.350000 | |
-6.750000 | -1.350000 | |
-4.050000 | -1.350000 | |
-1.350000 | -1.350000 | |
1.350000 | -1.350000 | |
4.050000 | -1.350000 | |
6.750000 | -1.350000 | |
9.450000 | -1.350000 | |
-9.450000 | -4.050000 | |
-6.750000 | -4.050000 | |
-4.050000 | -4.050000 | |
-1.350000 | -4.050000 | |
1.350000 | -4.050000 | |
4.050000 | -4.050000 | |
6.750000 | -4.050000 | |
9.450000 | -4.050000 | |
-9.450000 | -6.750000 | |
-6.750000 | -6.750000 | |
-4.050000 | -6.750000 | |
-1.350000 | -6.750000 | |
1.350000 | -6.750000 | |
4.050000 | -6.750000 | |
6.750000 | -6.750000 | |
9.450000 | -6.750000 | |
-9.450000 | -9.450000 | |
Alignment Marker | ||
-4.050000 | -9.450000 | |
-1.350000 | -9.450000 | |
1.350000 | -9.450000 | |
4.050000 | -9.450000 | |
Alignment Marker | ||
9.450000 | -9.450000 | |
-9.450000 | -12.150000 | |
-6.750000 | -12.150000 | |
-4.050000 | -12.150000 | |
-1.350000 | -12.150000 | |
1.350000 | -12.150000 | |
4.050000 | -12.150000 | |
6.750000 | -12.150000 | |
9.450000 | -12.150000 |