Difference between revisions of "ASML 5500: Recovering from an Error"
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(explained that wafers will be transferred thru stepper) |
(added instruciton to hit Help button) |
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# Do NOT exit task streaming! |
# Do NOT exit task streaming! |
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## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot. |
## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot. |
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+ | # If an "'''Abort Batch'''" Popup window appears: |
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− | # Abort the Batch: Choose the task from the Task List, click Batch > "Abort" |
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+ | ## Click the "'''Help'''" button, and take photos of the error chain |
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− | # In the following popup window, click "Remove Wafers from Litho Cluster" |
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+ | ## Click the "'''Help'''" button again, and write down timestamp of error in logbook/take screenshot - this helps engineer analyze the log file. |
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+ | ## Choose "'''Abort Batch, Clear Litho Cluster'''" - |
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+ | # Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click '''''Queue: Stop'''''. |
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Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. |
Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. |
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Revision as of 07:56, 5 October 2018
- Do NOT exit task streaming!
- If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
- If an "Abort Batch" Popup window appears:
- Click the "Help" button, and take photos of the error chain
- Click the "Help" button again, and write down timestamp of error in logbook/take screenshot - this helps engineer analyze the log file.
- Choose "Abort Batch, Clear Litho Cluster" -
- This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. This is the easiest way to make sure all wafers are taken out of the machine.
- Wait for the task status to change from "Aborting" to "Aborted"
- Abort the Batch: Make sure all batches say "Aborted" or "Completed". If not, choose the task from the Task List, click Batch > "Abort". May need to also click Queue: Stop.
Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.
Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job!