Difference between revisions of "ASML 5500: Recovering from an Error"
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(initial, copied from "recover from reticle ID typo") |
(explained that wafers will be transferred thru stepper) |
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## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot. |
## If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot. |
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# Abort the Batch: Choose the task from the Task List, click Batch > "Abort" |
# Abort the Batch: Choose the task from the Task List, click Batch > "Abort" |
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| − | # In the following popup window, click "Remove |
+ | # In the following popup window, click "Remove Wafers from Litho Cluster" |
| + | ## This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure. |
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# Wait for the task status to change from "Aborting" to "Aborted" |
# Wait for the task status to change from "Aborting" to "Aborted" |
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| − | Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list. |
+ | Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list. |
| + | |||
| + | Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job! |
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Revision as of 23:58, 20 March 2018
- Do NOT exit task streaming!
- If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
- Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
- In the following popup window, click "Remove Wafers from Litho Cluster"
- This will send all your wafers through the stepper, from Port 1 → Port 2. Thus no wafers will be waiting for exposure.
- Wait for the task status to change from "Aborting" to "Aborted"
Your wafer(s) should be removed to Port #2, and the task should state "Aborted" on the task list.
Please make sure there are no tasks in the "Waiting" state - please abort these tasks before leaving the system, or the next user's wafers will be shot with your job!