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File:PECVD2-SiN-Recipe.pdf (33 KB) - 12:07, 16 August 2012File:PECVD2-SiN-Data.pdf (36 KB) - 12:07, 16 August 2012File:Adv. PECVD2- STD Nitride2.xlsx (1.31 MB) - 10:05, 21 April 2020File:Adv. PECVD2- STD LSNitride2.xlsx (944 KB) - 10:08, 21 April 2020File:Adv. PECVD2-STD SiO2.xlsx (783 KB) - 10:59, 21 April 2020File:PECVD2 photo for cleaning.png (1,319 × 778 (1.88 MB)) - 14:32, 7 April 2020File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (34 KB) - 15:48, 3 October 2012File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:49, 3 October 2012File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf (706 KB) - 16:36, 3 October 2012File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf (35 KB) - 15:55, 3 October 2012File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf (35 KB) - 15:56, 3 October 2012File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf (34 KB) - 15:36, 3 October 2012File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:38, 3 October 2012File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf (658 KB) - 16:53, 3 October 2012File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf (34 KB) - 16:08, 3 October 2012File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf (35 KB) - 16:09, 3 October 2012File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf (41 KB) - 16:09, 3 October 2012File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf (35 KB) - 16:11, 3 October 2012File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf (35 KB) - 16:14, 3 October 2012File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf (700 KB) - 16:48, 3 October 2012