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File:PECVD2-SiN-Recipe-NoAr-50W-100C-Medium-Stress.pdf (42 KB) - 09:32, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf (41 KB) - 09:32, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf (41 KB) - 09:37, 20 August 2012File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 11:59, 3 October 2012File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf (41 KB) - 12:05, 3 October 2012File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf (42 KB) - 11:55, 3 October 2012- 1 KB (189 words) - 12:28, 3 March 2022
File:PECVD2 clean.png (1,094 × 781 (1.59 MB)) - 14:24, 7 April 2020File:PECVD2-SiN-Recipe.pdf (33 KB) - 12:07, 16 August 2012File:PECVD2-SiN-Data.pdf (36 KB) - 12:07, 16 August 2012File:PECVD2 photo for cleaning.png (1,319 × 778 (1.88 MB)) - 14:32, 7 April 2020File:Adv. PECVD2- STD Nitride2.xlsx (1.31 MB) - 10:05, 21 April 2020File:Adv. PECVD2- STD LSNitride2.xlsx (944 KB) - 10:08, 21 April 2020File:Adv. PECVD2-STD SiO2.xlsx (783 KB) - 10:59, 21 April 2020File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf (706 KB) - 16:36, 3 October 2012File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf (34 KB) - 15:48, 3 October 2012File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf (34 KB) - 15:49, 3 October 2012