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- 13:29, 17 March 2014 diff hist +27 Sputtering Recipes →Sputter 3 Process Table
- 13:28, 17 March 2014 diff hist +4 Sputtering Recipes
- 11:57, 17 March 2014 diff hist +1,000 Sputtering Recipes →Sputter 3 (AJA ATC 2000-F)
- 11:44, 12 March 2014 diff hist -241 DUV Flood Expose →Spectra Images
- 11:44, 12 March 2014 diff hist +242 Suss Aligners (SUSS MJB-3) →Detailed Specifications
- 14:12, 11 March 2014 diff hist 0 ICP-PECVD (Unaxis VLR) →Detailed Specifications
- 13:51, 11 March 2014 diff hist -58 E-Beam Evaporation Recipes →Materials Table (E-Beam #3)
- 13:46, 11 March 2014 diff hist 0 Stepper 3 (ASML DUV)
- 13:42, 11 March 2014 diff hist 0 Stepper 2 (AutoStep 200) →Detailed Specifications
- 13:41, 11 March 2014 diff hist +1 Stepper 2 (AutoStep 200) →About
- 10:45, 30 January 2014 diff hist +57 Vapor HF Etch (uETCH)
- 10:43, 30 January 2014 diff hist +1,547 N HF Vapor Etch Created page with "{{tool|{{PAGENAME}} |picture=XeF2.jpg |type = Dry Etch |super= Don Freeborn |phone=(805)839-3918x216 |location=Bay 2 |email=freeborn@ece.ucsb.edu |description = XeF<sub>2</sub..."
- 11:34, 28 January 2014 diff hist +129 Lithography Recipes →Nanoimprinting
- 11:33, 28 January 2014 diff hist 0 N File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx current
- 10:59, 28 January 2014 diff hist +68 Lithography Recipes →Chemical Datasheets
- 10:58, 28 January 2014 diff hist 0 N File:OrmoPrime-NIL-Adhesion-RevA.pdf current
- 10:57, 28 January 2014 diff hist +49 Lithography Recipes →Chemical Datasheets
- 10:56, 28 January 2014 diff hist 0 N File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf current
- 10:13, 28 January 2014 diff hist +24 Lithography Recipes →Chemical Datasheets
- 10:12, 28 January 2014 diff hist 0 N File:Mr-UVCur21.pdf current
- 10:11, 28 January 2014 diff hist +36 Lithography Recipes →Chemical Datasheets
- 11:10, 27 January 2014 diff hist +7 Lithography Recipes →Low-K Dielectric
- 11:01, 27 January 2014 diff hist +63 Lithography Recipes →Low-K Dielectric
- 10:59, 27 January 2014 diff hist 0 N File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx current
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:42, 24 October 2013 diff hist -238 ICP Etching Recipes →Sapphire Etch (Panasonic 1)
- 16:42, 24 October 2013 diff hist +238 ICP Etching Recipes →ICP Etch 2 (Panasonic E640)
- 16:38, 24 October 2013 diff hist 0 N File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf current
- 16:38, 24 October 2013 diff hist +130 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 16:36, 24 October 2013 diff hist +49 Dry Etching Recipes
- 15:25, 24 October 2013 diff hist 0 N File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf current
- 15:25, 24 October 2013 diff hist +168 ICP Etching Recipes →ICP Etch 1 (Panasonic E626I)
- 15:23, 24 October 2013 diff hist +54 Dry Etching Recipes
- 13:40, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf current
- 13:40, 24 October 2013 diff hist +151 ICP Etching Recipes →GaAs-AlGaAs Etch (Panasonic 1)
- 11:34, 24 October 2013 diff hist 0 N File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf current
- 11:34, 24 October 2013 diff hist +149 ICP Etching Recipes →AlGaAs Etch (Panasonic 1)
- 10:14, 24 October 2013 diff hist 0 N File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf current
- 10:13, 24 October 2013 diff hist +140 ICP Etching Recipes →GaN Etch (Panasonic 1)
- 17:09, 23 October 2013 diff hist +10 RIE Etching Recipes →RIE 5 (PlasmaTherm)
- 17:08, 23 October 2013 diff hist +46 Dry Etching Recipes
- 17:05, 23 October 2013 diff hist 0 N File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf current
- 17:05, 23 October 2013 diff hist +121 RIE Etching Recipes →RIE 2 (MRC)
- 17:04, 23 October 2013 diff hist +49 Dry Etching Recipes
- 16:40, 23 October 2013 diff hist 0 N File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf current
- 16:40, 23 October 2013 diff hist +169 RIE Etching Recipes →RIE 2 (MRC)
- 16:40, 23 October 2013 diff hist -168 RIE Etching Recipes →RIE 3 (MRC)
- 16:39, 23 October 2013 diff hist +169 RIE Etching Recipes
- 16:37, 23 October 2013 diff hist +82 Dry Etching Recipes
- 16:19, 23 October 2013 diff hist +48 Dry Etching Recipes