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- 08:02, 28 June 2012 diff hist +38 N Category:Wet Processing Redirected page to Tool List#Wet Processing current
- 07:57, 28 June 2012 diff hist 0 N File:UnaxisVLREtchInstructions.pdf current
- 07:52, 28 June 2012 diff hist +102 Editing Tutorials
- 07:52, 28 June 2012 diff hist 0 N File:UnaxisVLRInstructions.pdf current
- 07:52, 28 June 2012 diff hist +77 ICP-PECVD (Unaxis VLR)
- 07:49, 28 June 2012 diff hist +1,097 N ICP-PECVD (Unaxis VLR) Created page with "{{tool|{{PAGENAME}} |picture=UnaxisVLR.jpg |type = Vacuum Deposition |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 1 |email=bosch@ece.ucsb.edu |description = High Den…"
- 07:42, 28 June 2012 diff hist +75 Nano-Imprint (Nanonex NX2000) →About
- 07:42, 28 June 2012 diff hist +14 N Category:Datasheets Created page with "All Datasheets" current
- 07:42, 28 June 2012 diff hist +13 N File:Mr-l-7000-Imprint-Polymer.pdf {{datasheet}} current
- 07:41, 28 June 2012 diff hist +94 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 07:37, 28 June 2012 diff hist +44 N Template:MSDS Created page with "<includeonly>category:MSDS</includeonly>" current
- 07:37, 28 June 2012 diff hist +50 N Template:Datasheet Created page with "<includeonly>category:Datasheets</includeonly>" current
- 07:36, 28 June 2012 diff hist +13 N File:NXR-1020-Datasheet.pdf {{datasheet}} current
- 07:36, 28 June 2012 diff hist +51 Chemical List - OLD 2018-09-05 →Lithography Chemicals
- 07:34, 28 June 2012 diff hist +1,806 N Nano-Imprint (Nanonex NX2000) Created page with "{{tool|{{PAGENAME}} |picture=Nanonex.jpg |type = Lithography |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 4 |email=bosch@ece.ucsb.edu |description = Nanonex NX2000 N…"
- 07:31, 28 June 2012 diff hist +60 Tool List →Lithography
- 07:29, 28 June 2012 diff hist +13 N File:Tystar.jpg {{toolimage}} current
- 07:29, 28 June 2012 diff hist +1,139 N Tube Furnace (Tystar 8300) Created page with "{{tool|{{PAGENAME}} |picture=Tystar.jpg |type = Thermal Processing |super= Tony Bosch |phone=(805)839-3918x217 |location=Bay 3 |email=bosch@ece.ucsb.edu |description = Tystar 8" …"
- 07:27, 28 June 2012 diff hist +42 N Category:Thermal Processing Redirected page to Tool List#Thermal Processing current
- 07:24, 28 June 2012 diff hist -1 RIE 1 (Custom)
- 07:23, 28 June 2012 diff hist +80 Tool List →Thermal Processing
- 07:23, 28 June 2012 diff hist +21 MediaWiki:Sidebar
- 07:22, 28 June 2012 diff hist +176 N Editing Tutorials Created page with "=Tool Page Names= I am going off of the "Nanofab Equipment & Supervisor List" that is on dropbox. If the name of a page is incorrect, or you would like it changed, let me know."
- 07:18, 28 June 2012 diff hist +13 N File:RIE3.jpg {{toolimage}} current
- 07:17, 28 June 2012 diff hist +9 RIE 2 (MRC)
- 07:16, 28 June 2012 diff hist -3 RIE 3 (MRC)
- 07:16, 28 June 2012 diff hist -55 RIE 3 (MRC) →Detailed Specifications
- 07:14, 28 June 2012 diff hist +106 RIE 3 (MRC)
- 07:13, 28 June 2012 diff hist +371 RIE 3 (MRC)
- 07:11, 28 June 2012 diff hist +2,604 N RIE 3 (MRC) Created page with "{{tool|{{PAGENAME}} |picture=RIE2.jpg |type = Dry Etch |super= Brian Lingg |phone= 805-893-3918x210 |location=Bay 3 |email=lingg@ece.ucsb.edu |description = RIE #2 Methane / Hydr…"
- 07:07, 28 June 2012 diff hist +42 MediaWiki:Sidebar
- 21:53, 27 June 2012 diff hist -2 RIE 2 (MRC)
- 21:49, 27 June 2012 diff hist +13 N File:RIE2.jpg {{toolimage}} current
- 21:48, 27 June 2012 diff hist -4 RIE 2 (MRC)
- 21:47, 27 June 2012 diff hist +2,608 N RIE 2 (MRC) Created page with "{{tool|{{PAGENAME}} |picture=RIE2.jpg |type = Dry Etch |super= Don Freeborn |phone= 805-893-3918x216 |location=Bay 3 |email=freeborn@ece.ucsb.edu |description = RIE #2 Methane / …"
- 21:24, 27 June 2012 diff hist 0 Stepper 2 (AutoStep 200)
- 21:24, 27 June 2012 diff hist +369 DUV Flood Expose
- 21:23, 27 June 2012 diff hist 0 N File:DUV-System-Spectra.png current
- 21:22, 27 June 2012 diff hist 0 N File:DUV-Spectra-With-Filter.png current
- 21:17, 27 June 2012 diff hist 0 N File:DUV-Spectra-No-Filter.png current
- 21:15, 27 June 2012 diff hist +13 N File:DUV.jpg {{toolimage}} current
- 21:15, 27 June 2012 diff hist +1,085 N DUV Flood Expose Created page with "{{tool|{{PAGENAME}} |picture=DUV.jpg |type = Lithography |super= Mike Silva |phone=(805)839-3918x219 |location=Bay 6 |email=silva@ece.ucsb.edu |description = Deep UV Flood Expose…"
- 21:08, 27 June 2012 diff hist 0 Stepper 1 (GCA 6300)
- 21:06, 27 June 2012 diff hist -1 Stepper 2 (AutoStep 200)
- 21:05, 27 June 2012 diff hist +11 N Category:Manuals Created page with "All Manuals" current
- 21:05, 27 June 2012 diff hist +10 N File:GCA-200-Training-Manual.pdf {{manual}} current
- 21:04, 27 June 2012 diff hist +2,671 N Stepper 2 (AutoStep 200) Created page with "{{tool|{{PAGENAME}} |picture=Stepper1.jpg |type = Lithography |super= Adam Abrahamsen |phone=(805)839-3918x213 |location=Bay 3 |email=abrahamsen@ece.ucsb.edu |description = GCA 6…"
- 20:58, 27 June 2012 diff hist +29 N Template:Manual Redirected page to Template:Manuals current
- 20:57, 27 June 2012 diff hist +47 N Template:Manuals Created page with "<includeonly>Category:Manuals</includeonly>" current
- 20:57, 27 June 2012 diff hist +11 N File:GCA-6300-Training-Manual.pdf {{manuals}} current